公开(公告)号：JP2006318651A

公开(公告)日：2006-11-24

申请号：JP2005136803

申请日：2005-05-10

Applicant: Hitachi Ltd ,  株式会社日立製作所

Inventor： KASAI HIROTO ,  YOSHIDA TAKAO

IPC: H01J37/153 ,  H01J37/26

CPC classification number: H01J37/26 ,  H01J37/21 ,  H01J37/263 ,  H01J37/265 ,  H01J2237/2487

Abstract: PROBLEM TO BE SOLVED: To facilitate interpretation of electron microscope images obtained through alleviation of works by utilizing calculation on selection of conditions such as defocusing volumes or an objective lens aperture in a transmission electron microscope observation.
SOLUTION: With the help of a means of inputting a space size or a distance d an operator wishes to observe, and by calculating observation conditions alleviating influence of high contrast and superposed false images based on the values, desired modulation is applied on acceleration voltage or the like of the electron microscope.
COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：通过在透射电子显微镜观察中利用诸如散焦体积或物镜孔的条件的选择的计算来促进通过减轻作品获得的电子显微镜图像的解释。

解决方案：借助于输入操作者希望观察的空间大小或距离d的手段，并且通过计算观察条件来减轻基于该值的高对比度和叠加的假图像的影响，将期望的调制应用于 电子显微镜的加速电压等。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2009193834A

公开(公告)日：2009-08-27

申请号：JP2008033948

申请日：2008-02-15

Applicant: Hitachi Ltd ,  株式会社日立製作所

Inventor： HARADA KEN ,  KASAI HIROTO

IPC: H01J37/295 ,  H01J37/26

CPC classification number: H01J37/295 ,  H01J37/26 ,  H01J2237/0492 ,  H01J2237/1514 ,  H01J2237/1523 ,  H01J2237/228 ,  H01J2237/2588 ,  H01J2237/2614

Abstract: PROBLEM TO BE SOLVED: To obtain an interference microscope image of a multi-stage electron beam biprism by an electromagnetic lens system with the same number as the one-stage electron beam biprism without drop of operation flexibility of the multi-stage electron beam biprism. SOLUTION: An upper-stage electron beam biprism is arranged at further upstream side in a progress direction of an electron beam than a specimen, and an image of the electron beam biprism is formed on the specimen (on an object plane) with the use of an imaging action of an upstream side magnetic field of an objective lens. Then, a double-biprism interference optical system is constructed of a lower-stage electron beam biprism arranged downstream side of the objective lens up to the first image plane of the specimen. No new electromagnetic lens needs to be added in this optical system. COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：通过具有与一级电子束双棱镜相同数量的电磁透镜系统获得多级电子束双棱镜的干涉显微镜图像，而不会降低多级电子的操作灵活性 梁双棱镜。 解决方案：在电子束的进给方向上比检测体的进一步上游侧配置上级电子束双棱镜，在试样（物体平面）上形成电子束双棱镜的图像， 使用物镜的上游侧磁场的成像动作。 然后，双重棱镜干涉光学系统由布置在物镜的下游侧的低阶电子束双棱镜构成，直到样品的第一像平面。 在该光学系统中不需要添加新的电磁透镜。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2009193833A

公开(公告)日：2009-08-27

申请号：JP2008033945

申请日：2008-02-15

Applicant: Hitachi Ltd ,  株式会社日立製作所

Inventor： KASAI HIROTO ,  HARADA KEN

IPC: H01J37/26 ,  H01J37/20

CPC classification number: H01J37/26 ,  H01J37/141 ,  H01J37/20 ,  H01J2237/14 ,  H01J2237/20 ,  H01J2237/201 ,  H01J2237/2802

Abstract: PROBLEM TO BE SOLVED: To solve a problem that, since an objective lens having the most important role in electromagnetic lenses used for an electron microscope achieves a short focal length by a large exciting current to perform high spatial resolution, on the other hand, in case if it is used for dimension instrumentation, reproducibility of image forming condition is insufficient due to magnetic hysteresis, as well as observation in a low magnification of about 200 to 2,000 times is difficult, and also, since the specimen is disposed in a magnetic field generated in the objective lens, the specimen is observed in a state of being always immersed in a magnetic field. SOLUTION: The electron beam observation device includes a mechanism which disposes a specimen at an upstream side in an electron beam traveling direction outside an objective lens, from which an image is transferred under a magnification of 1/5 to 1/30, in addition to an inside of the objective lens in which a specimen is disposed at a time of ordinary observation. COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题为了解决由于在电子显微镜中使用的电磁透镜中具有最重要作用的物镜通过大的激励电流实现短焦距以执行高空间分辨率的问题，另一方面 手，如果用于尺寸仪器，则由于磁滞而导致图像形成条件的再现性不足，并且难以在约200至2,000倍的低倍率下观察，并且由于将样品置于 在物镜中产生的磁场，在始终浸没在磁场中的状态下观察样本。 解决方案：电子束观察装置包括将物镜放置在物镜外侧的电子束行进方向上游侧的试样，以1/5〜1/30的倍率进行图像转印的机构， 除了在普通观察时在其中放置样本的物镜的内部。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2007335083A

公开(公告)日：2007-12-27

申请号：JP2006161783

申请日：2006-06-12

Applicant: Hitachi Ltd ,  株式会社日立製作所

Inventor： KASAI HIROTO ,  KANEKO YUTAKA

IPC: H01J37/295 ,  G01N23/04

CPC classification number: H01J37/147 ,  G03H5/00 ,  H01J37/26 ,  H01J2237/1514 ,  H01J2237/2487 ,  H01J2237/2614

Abstract: PROBLEM TO BE SOLVED: To solve a problem in which an electron beam holography observation using a transmission type electron microscope has a complicated condition search of an electron optical system for achieving a required space resolution, and takes a long time for a person who is not familiar with the operation of an electron microscope.
SOLUTION: In addition to a basic electron microscope, this device comprises means for inputting a required space resolution in a holography observation, a calculating device for calculating an electron beam bi-prism and a specimen position for realizing a required space resolution from an input value and a parameter unique to the device, and a mechanism for moving these two positions for realizing the found calculation results.
COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题为了解决使用透射型电子显微镜的电子束全息观察具有用于实现所需的空间分辨率的电子光学系统的复杂条件搜索并且对于人来说需要很长时间的问题 谁不熟悉电子显微镜的操作。 解决方案：除了基本的电子显微镜之外，该装置包括用于在全息观察中输入所需的空间分辨率的装置，用于计算电子束双棱镜的计算装置和用于实现所需的空间分辨率的样本位置 输入值和设备唯一的参数，以及用于移动这两个位置以实现所找到的计算结果的机构。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JPH09306405A

公开(公告)日：1997-11-28

申请号：JP11229796

申请日：1996-05-07

Applicant: HITACHI LTD

Inventor： KUBOTA SHIGEO ,  KASAI HIROTO ,  YOSHIDA TAKAO ,  MATSUNAMI MASAYOSHI ,  MATSUDA TSUYOSHI ,  KAWASAKI TAKESHI ,  FURUTSU TADAO

IPC: H01J37/20

Abstract: PROBLEM TO BE SOLVED: To compensate generation of extremely low temperature and a temperature in a sample cooling device for an electron microscope or the like. SOLUTION: A sample cooling device is formed as a refrigerant storage vessel 16 of two-tank structure provided with a liquid helium storage vessel 18 in the inside of a liquid nitrogen storage vessel 17, independent two first/ second heat transfer members 23, 26 connected to the liquid helium storage vessel 18 and a third heat transfer member 20 connected to the liquid nitrogen storage vessel 17 are each almost cylindrically included in the outside of the first heat transfer member 23, heat transfer and heat shield are both provided. The first heat transfer member 23 is formed hollow, so as to allow a refrigerant to flow in, also heat transfer area is made variable by a piezoelectric element 27. In a sample 1 or sample holder 2, or a cooling member 3 loading the sample 1 or sample holder 2, a heater 25 and a temperature sensor 28 are provided, a temperature control device 29 and a piezoelectric element driving gear 30 are controlled by a closed loop, so as to be set controlled at an arbitrary temperature, the temperature is compensated.

公开(公告)号：JPH04322015A

公开(公告)日：1992-11-12

申请号：JP8810891

申请日：1991-04-19

Applicant: HITACHI LTD

Inventor： ENDO JUNJI ,  KASAI HIROTO ,  KAWASAKI TAKESHI

IPC: H01B17/66 ,  H01J37/073 ,  H01J37/248 ,  H05H9/00

Abstract: PURPOSE:To prevent any microdischarge from developing into a big discharge by forming a contact part to become relatively negative in a salient shape while providing a groove on the salient step part in the depth direction of an electric field. CONSTITUTION:In an acceleration tube, the sectional shape of a top junction part, located on the reletively negative side, is made salient and the cylindrical insulating members 10 are soldered on a salient top surface part, a salient projection part side surface, and on the inside and the bottom surfaces of a groove. These insulating members 10, in which each one part of them is in contact with a high-voltage side conductive member and the other part of them is in contact with a low-voltage conductive member, have conductive coatings 12 while being piled up through conductive members 11. The inner diameter and the outer diameter of the member 11 are eccentric, and an acceleration electrode 3 is mounted on its vacuum inside while a discharge preventive electrode is mounted on its outside. Further, divided resistances 9 are mounted in a wide interval between this member 10 and the electrode 4 so as to impress divided acceleration voltages on respective stages of an ecceleration tube. Then, a generated microcurrent passes through a part on which an electric field in the inverse direction is imposed in order to pass the surface of the member 10 to reach the other end. Thereby, the microcurrent is prevented from developing in a big dis-charge.