摘要:
PROBLEM TO BE SOLVED: To provide a fluid-bed reactor which successively, stably produces polycrystalline silicon, the reactor improving productivity and reducing a production cost.SOLUTION: This device for producing polycrystalline silicon includes: a reaction tube in which a silicon deposition reaction occurs; a fluid gas-feeding part which feeds a fluid gas to silicon particles in the reaction tube; and a means which keeps the reaction temperature constant when the silicon deposition reaction occurs in the reaction tube.
摘要:
PROBLEM TO BE SOLVED: To provide a fluid-bed reactor which stably feeds a reaction gas, improves efficiency in silicon deposition, and prevents polycrystalline silicon from being contaminated by impurities when silicon is deposited.SOLUTION: The fluid-bed reactor includes: a reaction tube in which silicon particles are included; and a reaction gas-feeding part having a channel which feeds a silicon element-containing reaction gas into the reaction tube along the reaction gas channel inside and surrounds the reaction gas channel.
摘要:
PROBLEM TO BE SOLVED: To provide a fluidized-bed reactor capable of mass production of polycrystalline silicon, easily assembled, installed and maintained, and capable of separating and assembling a first body part and a second body part with each other.SOLUTION: The fluidized-bed reactor includes: a head; the first body part located under the head and connected to the head, wherein a first reaction tube having a smaller diameter than the diameter of the head is located therein; the second body part located under the first body part and connected to the first body part, wherein a second reaction tube having substantially the same diameter as the diameter of the first reaction tube is located therein; and a bottom connected to the second body part.
摘要:
PROBLEM TO BE SOLVED: To provide a fluid-bed reactor which successively, stably produces polycrystalline silicon, the reactor improving productivity and reducing a production cost.SOLUTION: This device for producing polycrystalline silicon includes: a reaction tube in which silicon particles are included; a fluid gas-feeding part which feeds a fluid gas to the silicon particles in the reaction tube; a gas-discharging part which discharges a gas generated in the reaction tube; a pressure sensor which is mounted in the gas-discharging part or in the fluid gas-feeding part; and a particle-discharging outlet which discharges polycrystalline silicon, which is formed in the reaction tube, to the outside when the pressure measured by the pressure sensor is at least a reference pressure value.
摘要:
PROBLEM TO BE SOLVED: To provide a fluidized-bed reactor capable of uniformly supplying enough heat for silicon deposition and flowing gas, capable of mass-producing a polycrystalline silicon, and easy to assemble, install, and maintain.SOLUTION: The fluidized-bed reactor includes a reaction tube, a flowing gas supply unit that supplies the flowing gas in the reaction tube by independent control, and a reaction gas supply unit that supplies a reaction gas in the reaction tube.