Abstract:
Systems and methods for imaging characteristics of a sample and for identifying regions of damage in the sample are generally described. Some example systems and methods for non-destructive evaluation of regions of material may operate in a direct current (DC) mode in which the system directly images regions of material where weak structural damage has occurred by imaging a self magnetic field generated by a DC electric current coupled through the material. Some example systems may operate in an alternating current (AC) mode to image regions of material where damage has occurred by generating a time varying magnetic field due to AC excitation coils inducing eddy currents in the sample, and imaging a magnetic field generated by the eddy currents around the regions of damage. The systems may use magneto-optical imaging techniques (MOI) to measure and map the magnetic field and channels of current flow in the material, for example.
Abstract:
성막한 자성막의 자화 특성의 측정을 실행할 수 있는 성막 시스템 및 그것에 이용되는 자화 특성 측정 장치 및 자화 특성 측정 방법을 제공한다. 기판 상에 자성막을 성막하는 처리 모듈과, 처리 모듈에서 성막된 자성막의 자화 특성을 측정하는 자화 특성 측정 장치와, 처리 모듈과 자화 특성 측정 장치 사이에서 기판을 반송하는 반송부를 구비한다. 자화 특성 측정 장치는, 기판에 자장을 인가하는 동시에 상기 기판에 인가하는 자장을 조정 가능한 영구 자석 자기 회로를 갖는 자장 인가 기구와, 상기 기판의 자화 특성을 검출하는 검출기를 구비한다.
Abstract:
PROBLEM TO BE SOLVED: To measure the rubbing angle of the surface of an oriented film immediately after rubbing in a non-destructive manner with high precision of 0.1° or above in a short time for the purpose of the feedback to a rubbing process or the feed-forward to the process after rubbing within a manufacturing process. SOLUTION: The rubbing angle measuring device is composed of a light source unit, a measuring optical system, an imaging means and an image evaluation means, and the optical system is composed so that the light from a light source passes through an irradiation optical system, a polarizer, a rubbed measuring object, a detector and an imaging optical system to be thrown on the imaging means and the surface of a measuring target is formed into an image by the imaging means. The image signal obtained by the imaging means is transmitted to the image evaluation means and the signal having strong periodicity in the image is detected to measure the rubbing angle of the measuring target. COPYRIGHT: (C)2008,JPO&INPIT