Abstract:
PROBLEM TO BE SOLVED: To provide a surface treatment method for a cold cathode, for improving the field emission characteristics of the cold cathode with easy operation. SOLUTION: The surface treatment method for the cold cathode includes a first step of forming the cold cathode including a plurality of one-dimensional field emitters, a second step of applying liquid adhesive onto the surface of the cold cathode, a third step of solidifying the liquid adhesive applied onto the surface of the cold cathode, and a fourth step of removing the solidified adhesive from the surface of the cold cathode to erect the plurality of one-dimensional field emitters on the surface of the cold cathode. COPYRIGHT: (C)2011,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To facilitate adjustment of the optical axis of an electron beam from a field emission electron gun equipped with an electron source made of a fibered carbonic material, and to obtain an electron beam having an energy width narrower than that of the electron gun, and to provide a high-resolution electron beam application device equipped with the field emission electron gun. SOLUTION: The field emission electron gun includes the electron source made of the fibered carbonic material and a conductive base material supporting it, an extraction unit that causes field emission of electrons, and an accelerator that accelerates electrons. In the field emission electron gun, the fibered carbonic material is sheathed with a material having a band gap. The field emission electron gun applies to various electron beam application devices. COPYRIGHT: (C)2008,JPO&INPIT