Field emission electron gun and electron beam application device using the same
    5.
    发明专利
    Field emission electron gun and electron beam application device using the same 审中-公开
    场发射电子枪和电子束应用装置

    公开(公告)号:JP2008041289A

    公开(公告)日:2008-02-21

    申请号:JP2006210454

    申请日:2006-08-02

    Abstract: PROBLEM TO BE SOLVED: To facilitate adjustment of the optical axis of an electron beam from a field emission electron gun equipped with an electron source made of a fibered carbonic material, and to obtain an electron beam having an energy width narrower than that of the electron gun, and to provide a high-resolution electron beam application device equipped with the field emission electron gun. SOLUTION: The field emission electron gun includes the electron source made of the fibered carbonic material and a conductive base material supporting it, an extraction unit that causes field emission of electrons, and an accelerator that accelerates electrons. In the field emission electron gun, the fibered carbonic material is sheathed with a material having a band gap. The field emission electron gun applies to various electron beam application devices. COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题:为了便于从配备有由纤维碳材料制成的电子源的场致发射电子枪对电子束的光轴进行调节,并且获得具有比其更窄的能量宽度的电子束的电子束。 的电子枪,并提供配备有场发射电子枪的高分辨率电子束施加装置。 解决方案:场发射电子枪包括由纤维碳材料制成的电子源和支撑它的导电基底材料,引起电子场发射的提取单元和加速电子的加速器。 在场致发射电子枪中,纤维状碳材料用具有带隙的材料包覆。 场发射电子枪适用于各种电子束施加装置。 版权所有(C)2008,JPO&INPIT

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