Abstract:
PROBLEM TO BE SOLVED: To provide an aqueous composition for electron emission source formation, and an electron emission source using the same. SOLUTION: The aqueous composition for electron emission source formation contains a carbon system compound, a silicic compound and water. By this, a desired pattern is formed vividly by the aqueous composition for electron emission source formation. Since the electron emission source manufactured of the composition hardly has residual carbon, emission performance and a life are improved. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To facilitate adjustment of the optical axis of an electron beam from a field emission electron gun equipped with an electron source made of a fibered carbonic material, and to obtain an electron beam having an energy width narrower than that of the electron gun, and to provide a high-resolution electron beam application device equipped with the field emission electron gun. SOLUTION: The field emission electron gun includes the electron source made of the fibered carbonic material and a conductive base material supporting it, an extraction unit that causes field emission of electrons, and an accelerator that accelerates electrons. In the field emission electron gun, the fibered carbonic material is sheathed with a material having a band gap. The field emission electron gun applies to various electron beam application devices. COPYRIGHT: (C)2008,JPO&INPIT