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    증착된 잉크를 통해 측정된 광 투과율을 사용하여 잉크젯프린트 헤드 노즐을 교정하는 시스템 및 방법
    1.
    发明公开
    증착된 잉크를 통해 측정된 광 투과율을 사용하여 잉크젯프린트 헤드 노즐을 교정하는 시스템 및 방법 失效
    使用通过沉积墨水测量的光透射度来校准喷墨打印头喷嘴的系统和方法

    公开(公告)号：KR1020070117470A

    公开(公告)日：2007-12-12

    申请号：KR1020070054938

    申请日：2007-06-05

    Applicant: 어플라이드 머티어리얼스, 인코포레이티드

    Inventor： 샹,쿠안유안 ,  화이트,존엠.

    IPC: G02F1/13 ,  H01L21/66 ,  B41J2/01

    CPC classification number: B41J2/135 ,  B41J2/07 ,  B41J29/393 ,  G02F1/1303

    Abstract: A system and a method for calibrating inkjet print head nozzles by using light transmittance measured through deposited ink are provided to determine a volume of ink distributed by separate nozzles by measuring the amount of transmitted light through pixels charged with ink discharged by the separate nozzles, determine transmittance of a separate display pixel and control nozzle parameters, thereby calibrating the inkjet print nozzles. An inkjet print nozzle calibrating method(400) comprises the following steps of: distributing ink on a substrate by using inkjet print nozzles set with firing pulse parameters; measuring light transmittance characteristics of the distributed ink(406); determining a volume of the distributed ink based on the measured transmittance characteristics(412); and controlling the firing pulse parameters of the inkjet print nozzle based on a difference between the determined volume of the distributed ink and an expected ink volume level(416,418).

    Abstract translation: 提供了通过使用通过沉积的油墨测量的透光度来校准喷墨打印头喷嘴的系统和方法，以通过测量通过由分开的喷嘴排出的墨水的像素的透射光量来确定分开的喷嘴的墨水体积，确定 单独显示像素的透射率和控制喷嘴参数，从而校准喷墨打印喷嘴。 喷墨打印喷嘴校准方法（400）包括以下步骤：通过使用设置有点火脉冲参数的喷墨打印喷嘴将油墨分布在基板上; 测量分布式墨水的透光率特性（406）; 基于测量的透射率特性确定分布墨水的体积（412）; 并且基于所确定的分布墨水的体积与预期的墨水量之间的差异来控制喷墨打印喷嘴的点火脉冲参数（416,418）。

    복수 세트의 프린트 헤드를 이용한 잉크젯 프린팅 방법 및장치
    2.
    发明公开
    복수 세트의 프린트 헤드를 이용한 잉크젯 프린팅 방법 및장치 失效
    使用多组打印头进行喷墨打印的方法和装置

    公开(公告)号：KR1020070096908A

    公开(公告)日：2007-10-02

    申请号：KR1020070028740

    申请日：2007-03-23

    Applicant: 어플라이드 머티어리얼스, 인코포레이티드

    Inventor： 쿠리타,시니치 ,  샹,쿠안유안 ,  화이트,존엠.

    IPC: B41J2/14 ,  B41J2/07 ,  H05K3/12

    CPC classification number: B41J2/15 ,  B41J2/2135 ,  B41J3/28 ,  B41J3/543 ,  B41J11/008 ,  B41J11/0085 ,  B41J11/06 ,  G02F1/133516

    Abstract: An inkjet printing system for using plural sets of print heads, and a method thereof are provided to position an inkjet head effectively at an ink drop position on a substrate and to reduce the number of printing passes required to spray ink on the substrate. An inkjet printing system for using plural sets of print heads includes a first set(109), a second set(109), and a stage. The first set is formed with a first inkjet print head(201) having plural first nozzles to inject the first ink selectively, and a second inkjet print head(203) having plural second nozzles to inject the second ink selectively. The second set comprises a third inkjet print head(205) having plural third nozzles to inject the third ink selectively, and a fourth inkjet print head having plural fourth nozzles to inject the fourth ink selectively. The stage is installed to support a substrate(105) and to transfer the substrate under the first and second sets during a printing path. The first set is reached to an inside of a color well(207) for a display pixel(209) on the substrate separately to inject the first and second ink. The second set is positioned adjacently to the inside of the color well for the display pixel on the substrate to inject the third and fourth ink. An inkjet printing method includes a step of moving the substrate under the first and second sets at a printing direction during the printing pass.

    Abstract translation: 提供一种用于使用多组打印头的喷墨打印系统及其方法，用于将喷墨头有效地定位在基板上的墨滴位置，并减少在基板上喷墨所需的打印次数。 一种用于使用多组打印头的喷墨打印系统包括第一组（109），第二组（109）和舞台。 第一组形成有具有多个第一喷嘴的第一喷墨打印头（201），以便选择性地喷射第一墨;以及第二喷墨打印头（203），其具有多个第二喷嘴以选择性地喷射第二墨。 第二组包括具有选择性地喷射第三墨的多个第三喷嘴的第三喷墨打印头（205），以及具有多个第四喷嘴的第四喷墨打印头，用于选择性地喷射第四墨。 安装台阶以支撑基板（105）并且在打印路径期间将基板传送到第一和第二组下方。 第一组分别到达衬底上的显示像素（209）的彩色阱（207）的内部，以注入第一和第二墨水。 第二组位于相邻于彩色井的内部，用于衬底上的显示像素以注入第三和第四墨。 喷墨打印方法包括在打印通过期间在打印方向下移动第一组和第二组下方的基板的步骤。

    필름 스택의 인-시츄 프로세싱 방법 및 장치
    3.
    发明公开
    필름 스택의 인-시츄 프로세싱 방법 및 장치 无效
    用于现场薄膜堆叠处理的方法和装置

    公开(公告)号：KR1020070007915A

    公开(公告)日：2007-01-16

    申请号：KR1020067023381

    申请日：2005-04-01

    Applicant: 어플라이드 머티어리얼스, 인코포레이티드

    Inventor： 메리,왈터알. ,  샹,쿠안유안 ,  화이트,존엠.

    IPC: H01L21/205 ,  H01L21/67

    CPC classification number: H01J37/3244 ,  H01J37/32357 ,  H01J37/32522 ,  H01J37/32788 ,  H01J2237/3325 ,  H01J2237/334

    Abstract: Embodiments of a cluster tool, processing chamber and method for processing a film stack are provided. In one embodiment, a method for in-situ etching of silicon and metal layers of a film stack is provided that includes the steps of etching an upper metal layer of the film stack in a processing chamber to expose a portion of an underlying silicon layer, and etching a trench in the silicon layer without removing the substrate from the processing chamber. The invention is particularly useful for thin film transistor fabrication for flat panel displays. ® KIPO & WIPO 2007

    Abstract translation: 提供了一种用于处理薄膜叠层的集群工具，处理室和方法的实施例。 在一个实施例中，提供了一种用于原位蚀刻膜堆叠的硅和金属层的方法，其包括以下步骤：在处理室中蚀刻膜堆叠的上金属层以暴露下层硅层的一部分， 并且在硅层中蚀刻沟槽而不从处理室移除衬底。 本发明对于平板显示器的薄膜晶体管制造特别有用。 ®KIPO＆WIPO 2007

    반도체 처리용 챔버를 세정하기 위한 불소 처리 방법
    5.
    发明授权
    반도체 처리용 챔버를 세정하기 위한 불소 처리 방법 失效
    반도체처리용챔버를세정하기위한불소처리방반

    公开(公告)号：KR100455459B1

    公开(公告)日：2004-11-08

    申请号：KR1020010015958

    申请日：2001-03-27

    Applicant: 어플라이드 머티어리얼스, 인코포레이티드

    Inventor： 고토,하루히로해리 ,  하쉬바거,윌리암알. ,  샹,쿠안유안 ,  로,캠에스.

    IPC: H01L21/02

    CPC classification number: C23C16/4405 ,  Y02C20/30 ,  Y02P70/605 ,  Y10S134/902 ,  Y10S438/905

    Abstract: 본 발명은 주요 전구체 시약으로서 분자 불소 기체(F
    2 )를 사용하여 반도체 처리용 챔버의 내부로부터 잔류물을 제거하기 위한 방법에 관한 것이다. 한 가지 양태에서, 분자 불소의 일부가 플라즈마에서 분해되어 원자 불소를 생성시키고, 원자 불소와 분자 불소의 생성된 혼합물이 내부를 세정시키려는 챔버에 공급된다. 또 다른 양태에 있어서, 분자 불소 기체는 임의의 플라즈마 여기 없이 반도체 처리용 챔버를 세정시킨다. 분자 불소 기체는 NF
    3 , C
    2 F
    6 및 SF
    6 와 같은 챔버 세정에 통상적으로 사용되는 불소 함유 기체 화합물과는 달리 지구 온난화 기체가 아니라는 점에서 이점을 지닌다.

    Abstract translation: 使用分子氟气（F2）作为主要前体试剂从半导体处理室内部除去残留物的方法。 在一个实施例中，分子氟的一部分在等离子体中分解以产生原子氟，并且原子氟和分子氟的所得混合物被供应到其内部将被清洁的腔室。 在另一个实施例中，分子氟气在没有任何等离子体激发的情况下清洁半导体处理室。 与常规用于腔室清洁的含氟气体化合物例如NF3，C2F6和SF6不同，分子氟气具有不是全球变暖气体的优点。

    광전지 콘택 및 배선 형성 방법
    6.
    发明公开
    광전지 콘택 및 배선 형성 방법 无效
    光伏接触和接线形成

    公开(公告)号：KR1020080075156A

    公开(公告)日：2008-08-14

    申请号：KR1020087013628

    申请日：2006-11-06

    Applicant: 어플라이드 머티어리얼스, 인코포레이티드

    Inventor： 바치라치,로버트제트. ,  샹,쿠안유안 ,  예,얀

    IPC: H01L31/04 ,  H01L31/18

    CPC classification number: C23C14/35 ,  C23C14/564 ,  H01L31/022425 ,  H01L31/18 ,  H05K3/048 ,  Y02E10/50

    Abstract: A method and apparatus for fabricating a solar cell and forming metal contact is disclosed. Solar cell contact and wiring is formed by depositing a thin film stack of a first metal material and a second metal material as an initiation layer or seed layer for depositing a bulk metal layer in conjunction with additional sheet processing, photolithography, etching, cleaning, and annealing processes. In one embodiment, the thin film stack for forming metal silicide with reduced contact resistance over the sheet is deposited by sputtering or physical vapor deposition. In another embodiment, the bulk metal layer for forming metal lines and wiring is deposited by sputtering or physical vapor deposition. In an alternative embodiment, electroplating or electroless deposition is used to deposit the bulk metal layer.

    Abstract translation: 公开了一种用于制造太阳能电池和形成金属接触的方法和装置。 通过沉积第一金属材料和第二金属材料的薄膜堆叠来形成太阳能电池接触和布线，所述第一金属材料和第二金属材料作为起始层或籽晶层，用于结合额外的片材处理，光刻，蚀刻，清洁和 退火工艺。 在一个实施例中，通过溅射或物理气相沉积沉积用于形成具有降低的片上接触电阻的金属硅化物的薄膜叠层。 在另一个实施例中，通过溅射或物理气相沉积沉积用于形成金属线和布线的体金属层。 在替代实施例中，使用电镀或无电沉积来沉积体金属层。

    블랙 매트릭스 조성물들 및 이의 형성 방법들
    7.
    发明公开
    블랙 매트릭스 조성물들 및 이의 형성 방법들 失效
    黑矩阵组合物及其形成方法

    公开(公告)号：KR1020080011054A

    公开(公告)日：2008-01-31

    申请号：KR1020070065587

    申请日：2007-06-29

    Applicant: 어플라이드 머티어리얼스, 인코포레이티드

    Inventor： 샹,쿠안유안 ,  초우,리구이

    IPC: G03F7/004 ,  G02B5/20

    CPC classification number: G03F7/0046 ,  G02B5/20 ,  G02B5/201 ,  G03F7/004 ,  G03F7/0045

    Abstract: A black matrix composition, a coated substrate using the composition, and a method for forming a color filter for a flat panel display by using the composition are provided to improve the precision of spraying of an ink, thereby enhancing the quality of a color filter prepared by an ink-jet printing method of high treatment amount. A black matrix composition comprises an additive comprising polymerizable molecules, wherein the each polymerizable molecule comprises a polar moiety and an apolar moiety, and the apolar moiety has no affinity to an ink. Preferably the apolar moiety of the polymerizable molecules moves toward the surface of the composition. Preferably the additive comprises at least one selected from a fluorinated acrylate monomer, a fluorinated acrylate oligomer, a silicone group-containing acrylate monomer, a silicone group-containing acrylate oligomer, a hydrophobic group-containing acrylate monomer, a hydrophobic group-containing acrylate oligomer, a reactive wax, and a fluorosilane.

    Abstract translation: 提供黑色基质组合物，使用该组合物的涂布基材和通过使用该组合物形成用于平板显示器的滤色器的方法以提高油墨的喷墨精度，从而提高制备的滤色器的质量 通过高处理量的喷墨打印方法。 黑色基质组合物包括包含可聚合分子的添加剂，其中每个可聚合分子包含极性部分和非极性部分，并且非极性部分对油墨没有亲和力。 优选地，可聚合分子的非极性部分向组合物的表面移动。 优选地，添加剂包括选自氟化丙烯酸酯单体，氟化丙烯酸酯低聚物，含硅氧烷基丙烯酸酯单体，含硅氧烷基丙烯酸酯低聚物，含疏水基团的丙烯酸酯单体，含疏水基团的丙烯酸酯低聚物 ，活性蜡和氟硅烷。

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