광전지 콘택 및 배선 형성 방법
    7.
    发明公开
    광전지 콘택 및 배선 형성 방법 无效
    光伏接触和接线形成

    公开(公告)号:KR1020080075156A

    公开(公告)日:2008-08-14

    申请号:KR1020087013628

    申请日:2006-11-06

    Abstract: A method and apparatus for fabricating a solar cell and forming metal contact is disclosed. Solar cell contact and wiring is formed by depositing a thin film stack of a first metal material and a second metal material as an initiation layer or seed layer for depositing a bulk metal layer in conjunction with additional sheet processing, photolithography, etching, cleaning, and annealing processes. In one embodiment, the thin film stack for forming metal silicide with reduced contact resistance over the sheet is deposited by sputtering or physical vapor deposition. In another embodiment, the bulk metal layer for forming metal lines and wiring is deposited by sputtering or physical vapor deposition. In an alternative embodiment, electroplating or electroless deposition is used to deposit the bulk metal layer.

    Abstract translation: 公开了一种用于制造太阳能电池和形成金属接触的方法和装置。 通过沉积第一金属材料和第二金属材料的薄膜堆叠来形成太阳能电池接触和布线,所述第一金属材料和第二金属材料作为起始层或籽晶层,用于结合额外的片材处理,光刻,蚀刻,清洁和 退火工艺。 在一个实施例中,通过溅射或物理气相沉积沉积用于形成具有降低的片上接触电阻的金属硅化物的薄膜叠层。 在另一个实施例中,通过溅射或物理气相沉积沉积用于形成金属线和布线的体金属层。 在替代实施例中,使用电镀或无电沉积来沉积体金属层。

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