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    반응 챔버와 이를 포함하는 탄소나노튜브 합성 장치 및 설비
    10.
    发明授权
    반응 챔버와 이를 포함하는 탄소나노튜브 합성 장치 및 설비 有权
    反应室，收集与其相同的碳纳米管的装置和系统

    公开(公告)号：KR100824301B1

    公开(公告)日：2008-04-22

    申请号：KR1020060131459

    申请日：2006-12-21

    Applicant: 세메스 주식회사

    Inventor： 김성수 ,  전종관

    IPC: C01B31/02 ,  B82B3/00 ,  B82Y40/00

    CPC classification number: B01J6/00 ,  B01J19/24 ,  B01J19/2445 ,  B01J19/248 ,  B01J2219/00038 ,  B01J2219/0009 ,  B01J2219/00135 ,  B01J2219/00139 ,  B01J2219/00146 ,  B01J2219/00162 ,  B01J2219/00164 ,  B01J2219/182 ,  B01J2219/1923 ,  B01J2219/1943 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  Y10S977/842 ,  Y10S977/843 ,  Y10S977/855

    Abstract: A reaction chamber for synthesizing carbon nanotubes is provided to obtain excellent spatial efficiency of the reaction chamber, an apparatus for synthesizing carbon nanotubes comprising the reaction chamber is provided, and a system comprising the apparatus for synthesizing carbon nanotubes is provided. A reaction chamber(100) comprises: a reaction tube(10) which is constructed in a box type structure that is capable of accommodating a substrate therein, and which provides a space for synthesizing carbon nanotubes on the substrate; a gas inlet(14) which is formed in one portion of the reaction tube in the form of a through hole, and which provides a passage that flows a source gas for synthesizing carbon nanotubes into the reaction tube; a gas outlet(16) which is formed in the other portion of the reaction tube opposite to the one portion of the reaction tube having the gas inlet formed therein in the form of a through hole, and which provides a passage for exhausting the source gas that has been flown into the reaction tube to the outside of the reaction tube; and a heat flow path(12) which is formed, in the bar type structure, in one portion of the reaction tube having a direction parallel to the substrate housed in the reaction tube in residual portions of the reaction tube except the portions of the reaction tube having the gas inlet and the gas outlet formed therein, and which provides a passage for transferring a heat for heating an inner part of the reaction tube into the reaction tube. The reaction chamber further comprises a pressure adjusting path(18) which is formed, in the form of a through hole, in another portion of the reaction tube except the portions of the reaction tube having the gas inlet, the gas outlet, and the heat flow path formed therein, and which provides a passage for adjusting a pressure state of the inner part of the reaction tube.

    Abstract translation: 提供用于合成碳纳米管的反应室以获得反应室的优异的空间效率，提供了一种用于合成包含反应室的碳纳米管的装置，并且提供了一种包括用于合成碳纳米管的装置的系统。 反应室（100）包括：反应管（10），其被构造成能够容纳基板的盒式结构，并且在基板上提供用于合成碳纳米管的空间; 气体入口（14），其形成在通孔形式的反应管的一部分中，并且提供将用于合成碳纳米管的源气体流入反应管的通道; 形成在反应管的另一部分中的气体出口（16），反应管的另一部分与反应管的一部分形成有通气孔的形式的反应管的一部分相反，并且提供用于排出源气体 已经被反应管流入反应管的外部; 以及在所述棒状结构中在所述反应管的一部分中形成有与所述反应管中容纳在所述反应管中的基板平行的方向的反应管的除了所述反应部分之外的部分的热流路（12） 其具有形成在其中的气体入口和气体出口，并且其提供用于传递热量以将反应管的内部加热到反应管中的通道。 反应室还包括在反应管的另一部分中形成为通孔形式的压力调节通道（18），除了具有气体入口，气体出口和热量的反应管的部分之外 形成在其中的流路，并且其提供用于调节反应管的内部的压力状态的通道。

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