Abstract:
PURPOSE: A single wafer processing apparatus, an apparatus and a method for manufacturing an epitaxial wafer using the same are provided to perform a wafer process of high efficiency and high quality by supplying a cleaning solution and an etching solution suitable for a front surface and a rear surface of a wafer. CONSTITUTION: A single wafer processing apparatus includes a plurality of rotating bodies(210) in which a wafer(10) is mounted, a rotary shaft(220) for rotating the rotating bodies, and a spray unit which sprays a cleaning solution and an etching solution on the wafer mounted in the rotating bodies. A groove is formed according to an outer circumference of a side surface of the rotating bodies. The wafer is mounted by fixing an edge of the wafer to the groove. The rotary shaft rotates each rotating body around a central shaft of the rotating bodies. The spray unit includes a front side nozzle(232) which sprays the solutions on a front surface of the wafer and a rear side nozzle(234) which sprays the solutions on a rear surface of the wafer.
Abstract:
The present invention relates to a two-component traffic lane painting apparatus for painting a traffic lane on a road using a main activator, a main hardener, and a two-component reactive resin, and a construction method using a two-component substance. Since the main activator and the main hardener are respectively sprayed and mixed on the surface of the road to paint the traffic lane, without using a mixer for mixing the main activator and the main hardener, it is possible to prevent the paint from being solidified during the work or after the work, and thus to continuously carry out the painting of the traffic lane. Therefore the effectiveness of the traffic lane painting work, such as uniform spraying, is improved. Since the surface of the road can be cleaned directly from the front of the portion to be painted with the traffic lane, the painting work can be quickly and effectively carried out. Since the spray direction of air and beads to clean the surface of the road is opposite to the spray direction of the main activator and the main hardener, the mixing of the main activator and the main hardener is not interfered with while the air and beads are spraying, thereby improving the speed and the convenience of the traffic lane painting. The painting is quickly carried out, and elongation is 200% to prevent the formation of cracks.
Abstract:
PURPOSE: A photocatalyst coating device and a photocatalyst coating method using the same are provided to evenly apply a binder solution and a photocatalytic coating liquid to the surface of a base material and to improve the lifetime of the base material by preventing direct coating of the base material. CONSTITUTION: A photocatalyst coating device includes a surface treatment unit(100), a first spray unit(200), a second spray unit(300), and a heat drying unit(400). The surface treatment unit increases the temperature of a base metal to strongly adhere the coating solution to the surface of the base metal. The first spray unit sprays the binder solution to the base material in which the temperature is increased to enhance adhesion and activation to the photocatalyst solution. The second spray unit applies the photocatalytic coating liquid to the base material. The heat drying unit dries the binder solution and the photocatalytic coating liquid.
Abstract:
PURPOSE: An apparatus for spraying a chemical and an apparatus for processing a substrate including the same are proved to spray a chemical on a substrate evenly by reciprocating a nozzle on the jet pipe in first direction. CONSTITUTION: In a apparatus for spraying a chemical and an apparatus for processing a substrate including the same, a feeding line(310) is installed along first direction the chemical(C) while being supplied from the outside. The feeding line is directly connected to a chemical feed port(10) from the processing chamber. A plurality of nozzles on the injecting pipe are formed along second direction to spray the chemical. The driving part(330) drives the feeding line, and a flexible pipe is formed to reciprocate feeding line. The driving part includes a motor(340) and a power transmission which provide a rotational motion.
Abstract:
PURPOSE: To provide a fine powder spraying apparatus capable of partially altering the density of a fine powder in the case the fine powder for a spacer or the like of a liquid crystal is sprayed to an object body to be coated such as a glass substrate. CONSTITUTION: A spraying apparatus 10 for a spacer for a liquid crystal which is to be installed at a prescribed distance from a glass substrate and sprays a spacer for a liquid crystal together with the current of a gaseous material out of the tip is provided with a touch panel 96 for inputting control coefficient values to control the moving speed of the tip end part of a spraying nozzle pipe 18 at respective points of the glass substrate and an actuator driver 92 for controlling the moving speed of the tip end part of the spraying nozzle pipe 18 based on the control coefficient values inputted through the touch panel 96.
Abstract:
PURPOSE: A paste coating apparatus and a paste coating method are provided to improve the quality of a coated product by increasing the measurement accuracy of the coated height of paste. CONSTITUTION: A paste coating apparatus(1) includes a plurality of coating heads(3a), a plurality of laser displacement meters(3c), and a controlling part. The coating heads coat paste on the side to be coated of an object(W). The laser displacement meters are integrated with the coating heads and measure the displacement of the side to be coated. At least one of the laser displacement meters allows an optical path side to follow one straight line of two straight lines in coating patterns. At least one of the laser displacement meters allows an optical path side to follow another straight line of two straight lines in the coating patterns.