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公开(公告)号:TWI455219B
公开(公告)日:2014-10-01
申请号:TW097125660
申请日:2008-07-08
发明人: 大衛J. 費克魯德 , FRYKLUND, DAVID J. , 阿菲德H. 卡爾 , CARL, ALFRED H. , 布萊恩P. 墨菲 , MURPHY, BRIAN P.
IPC分类号: H01L21/60
CPC分类号: H01L21/6835 , H01L23/3114 , H01L23/5389 , H01L23/544 , H01L23/552 , H01L23/66 , H01L24/19 , H01L24/20 , H01L24/29 , H01L24/48 , H01L24/82 , H01L24/83 , H01L24/97 , H01L2221/68345 , H01L2223/5442 , H01L2223/54426 , H01L2223/54473 , H01L2223/5448 , H01L2224/02381 , H01L2224/04105 , H01L2224/05001 , H01L2224/05568 , H01L2224/05573 , H01L2224/12105 , H01L2224/16225 , H01L2224/16227 , H01L2224/24137 , H01L2224/2919 , H01L2224/32225 , H01L2224/32245 , H01L2224/48091 , H01L2224/48247 , H01L2224/73204 , H01L2224/73267 , H01L2224/83121 , H01L2224/83801 , H01L2224/92244 , H01L2224/97 , H01L2924/00014 , H01L2924/01006 , H01L2924/01013 , H01L2924/0102 , H01L2924/01023 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/0104 , H01L2924/01057 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/10329 , H01L2924/1306 , H01L2924/15192 , H01L2924/15311 , H01L2924/30107 , H01L2924/3025 , H01L2924/0665 , H01L2224/82 , H01L2924/00 , H01L2224/45099 , H01L2224/45015 , H01L2924/207