公开(公告)号：US07238429B2

公开(公告)日：2007-07-03

申请号：US10946051

申请日：2004-09-21

Applicant: Bruce Allan Cook ,  Yun Tian ,  Joel Lee Harringa ,  Alan Paul Constant ,  Alan Mark Russell ,  Palaniappa A. Molian

Inventor： Bruce Allan Cook ,  Yun Tian ,  Joel Lee Harringa ,  Alan Paul Constant ,  Alan Mark Russell ,  Palaniappa A. Molian

IPC: B32B15/20 ,  C23C14/34 ,  C23C14/16 ,  C22C21/00

CPC classification number: C23C14/067 ,  B81B3/0075 ,  B81C2201/032 ,  C23C14/28 ,  Y10S428/938 ,  Y10T428/12736 ,  Y10T428/1275 ,  Y10T428/31678

Abstract: Performance and reliability of microelectromechanical system (MEMS) components enhanced dramatically through the incorporation of protective thin film coatings. Current-generation MEMS devices prepared by the LIGA technique employ transition metals such as Ni, Cu, Fe, or alloys thereof, and hence lack stability in oxidizing, corrosive, and/or high temperature environments. Fabrication of a superhard, self-lubricating coating based on a ternary boride compound AlMgB14 is described in this letter as a potential breakthrough in protective coating technology for LIGA microdevices. Nanoindentation tests show that hardness of AlMgB14 films prepared by pulsed laser deposition ranges from 45 GPa to 51 GPa, when deposited at room temperature and 573 K, respectively. Extremely low friction coefficients of 0.04-0.05, which are thought to result from a self-lubricating effect, have also been confirmed by nanoscratch tests on the AlMgB14 films. Transmission electron microscopy studies show that the as-deposited films are amorphous, regardless of substrate temperature; however, analysis of FTIR spectra suggests that the higher substrate temperature facilitates formation of the B12 icosahedral framework, therefore leading to the higher hardness.

Abstract translation: 微机电系统（MEMS）组件的性能和可靠性通过并入保护性薄膜涂层而显着提高。 通过LIGA技术制备的当前一代MEMS器件采用过渡金属如Ni，Cu，Fe或其合金，因此在氧化，腐蚀性和/或高温环境中缺乏稳定性。 在本文中描述了基于三元硼化物AlMgB 14的超硬自润滑涂层的制造，作为LIGA微型器件的保护涂层技术的潜在突破。 纳米压痕测试显示，当分别在室温和573K下沉积时，通过脉冲激光沉积制备的AlMgB 14 N膜的硬度范围为45GPa至51GPa。 认为是由自润滑效应引起的非常低的摩擦系数0.04-0.05也已经通过AlMgB 14膜的纳米尺度试验证实。 透射电子显微镜研究表明，沉积膜是无定形的，不管基底温度如何; 然而，FTIR光谱的分析表明较高的底物温度有助于形成B 12二十面体骨架，因此导致更高的硬度。

公开(公告)号：US07517375B2

公开(公告)日：2009-04-14

申请号：US11325292

申请日：2006-01-04

Applicant: Bruce Allan Cook ,  Joel Lee Harringa ,  Alan Mark Russell ,  Justin S. Peters ,  Atiq Ahmed

Inventor： Bruce Allan Cook ,  Joel Lee Harringa ,  Alan Mark Russell ,  Justin S. Peters ,  Atiq Ahmed

IPC: C09K3/14 ,  C22C29/00 ,  C22C29/12 ,  C04B35/00

CPC classification number: C04B35/645 ,  C04B35/5805 ,  C04B35/58057 ,  C04B35/58071 ,  C04B2235/3804 ,  C04B2235/3808 ,  C04B2235/3813 ,  C04B2235/76 ,  C04B2235/77 ,  C04B2235/785 ,  C04B2235/80 ,  C04B2235/96

Abstract: A highly wear resistant sintered, hot pressed, or otherwise compacted ceramic composite material is described, consisting of two discrete phases of the form AlxMgyB14 where x and y ≦1 or like hard, orthorhombic compounds, and TiB2 or like Group IVB transition metal di-borides, and with an unexpectedly high content of transition metal di-boride in the range from 40 to 90 percent (28 to 85 volume percent).

Abstract translation: 描述了高度耐磨的烧结，热压或其它压实的陶瓷复合材料，其由两个离散的相形式，其中x和y = 1或类似的硬的正交化合物，以及TiB 2或IVB族过渡金属二 硼化物，并且意外高含量的过渡金属二硼化物在40至90％（28至85体积％）的范围内。

公开(公告)号：US07172641B2

公开(公告)日：2007-02-06

申请号：US10871933

申请日：2004-06-18

Applicant: Bruce Allan Cook ,  Alan Mark Russell ,  Joel Lee Harringa ,  S. Bulent Biner ,  Iver Anderson

Inventor： Bruce Allan Cook ,  Alan Mark Russell ,  Joel Lee Harringa ,  S. Bulent Biner ,  Iver Anderson

IPC: C22C49/06

CPC classification number: C22C49/14 ,  B22F2998/00 ,  C22C32/0073 ,  B22F3/02 ,  B22F3/10 ,  B22F3/14 ,  C22C1/1036

Abstract: A composite of M/AlMgB14 or M alloy/AlMgB14 is synthesized, where M=Al, Ti, W, or Cu. Small particles and/or fibers of AlMgB14 are distributed throughout a metal matrix to strengthen the resulting composite.

Abstract translation: 合成M / AlMgB 14或M合金/ AlMgB 14 N的复合物，其中M = Al，Ti，W或Cu。 AlMgB 14的小颗粒和/或纤维分布在整个金属基体中以加强所得的复合材料。