公开(公告)号：US20120291549A1

公开(公告)日：2012-11-22

申请号：US13564615

申请日：2012-08-01

申请人： Joseph SEEGER ,  Bruno BOROVIC

发明人： Joseph SEEGER ,  Bruno BOROVIC

IPC分类号： G01C19/5719

CPC分类号： G01C19/5712 ,  G01C19/56 ,  G01C19/5719 ,  G01C19/574

摘要： An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting from motion of the masses and angular velocity about at least one input axis of the sensor. Additional embodiments can include a linkage that constrains the masses to move in the extension mode.

摘要翻译： 包括驱动器扩展模式的角速度传感器。 一方面，角速度传感器包括基部和基本上设置在平行于基部的平面中的至少三个质量，质量块具有质心。 至少一个致动器以延伸模式驱动质量，使得在延伸模式中，质量在平面中同时移动或同时移向质心。 至少一个换能器感测由质量的运动和围绕传感器的至少一个输入轴线的角速度产生的至少一个科里奥利力。 另外的实施例可以包括限制质量以伸展模式移动的连杆。

公开(公告)号：US08534127B2

公开(公告)日：2013-09-17

申请号：US12558398

申请日：2009-09-11

申请人： Joseph Seeger ,  Bruno Borovic

发明人： Joseph Seeger ,  Bruno Borovic

IPC分类号： G01C19/00

CPC分类号： G01C19/5712 ,  G01C19/56 ,  G01C19/5719 ,  G01C19/574

摘要： An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting from motion of the masses and angular velocity about at least one input axis of the sensor. Additional embodiments can include a linkage that constrains the masses to move in the extension mode.

公开(公告)号：US20100252897A1

公开(公告)日：2010-10-07

申请号：US12418554

申请日：2009-04-03

申请人： Joseph SEEGER ,  Goksen G. YARALIOGLU ,  Bruno BOROVIC ,  Alexander CASTRO

发明人： Joseph SEEGER ,  Goksen G. YARALIOGLU ,  Bruno BOROVIC ,  Alexander CASTRO

IPC分类号： H01L29/84

CPC分类号： B81C1/00039 ,  B81B2203/0307

摘要： An anchoring assembly for anchoring MEMS device is disclosed. The anchoring assembly comprises: a top substrate; a bottom substrate substantially parallel to the top substrate; and a first portion of the anchor between the top substrate and the bottom substrate. The first portion of the anchor is rigidly connected to the top substrate; and the first portion of the anchor is rigidly connected to the bottom substrate. A second portion of the anchor is between the top substrate and the bottom substrate. The second portion of the anchor is rigidly connected to the top substrate; the second portion of the anchor being an anchoring point for the MEMS device. A substantially flexible mechanical element coupling the first portion of the anchor and the second portion of the anchor; the flexible element providing the electrical connection between the first portion of the anchor and the second portion of the anchor.

摘要翻译： 公开了一种用于锚定MEMS装置的锚固组件。 锚固组件包括：顶部基底; 基本上平行于顶部衬底的底部衬底; 以及锚固件在顶部基底和底部基底之间的第一部分。 锚的第一部分刚性地连接到顶部基底; 并且锚的第一部分刚性地连接到底部基底。 锚的第二部分在顶部基底和底部基底之间。 锚的第二部分刚性地连接到顶部基底; 锚的第二部分是用于MEMS装置的锚定点。 将锚固件的第一部分和锚固件的第二部分联接的基本上柔性的机械元件; 所述柔性元件提供所述锚固件的第一部分和所述锚固件的第二部分之间的电连接。

公开(公告)号：US08347717B2

公开(公告)日：2013-01-08

申请号：US13564615

申请日：2012-08-01

申请人： Joseph Seeger ,  Bruno Borovic

发明人： Joseph Seeger ,  Bruno Borovic

IPC分类号： G01C19/00

CPC分类号： G01C19/5712 ,  G01C19/56 ,  G01C19/5719 ,  G01C19/574

摘要： An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting from motion of the masses and angular velocity about at least one input axis of the sensor. Additional embodiments can include a linkage that constrains the masses to move in the extension mode.

公开(公告)号：US08141424B2

公开(公告)日：2012-03-27

申请号：US12210045

申请日：2008-09-12

申请人： Joseph Seeger ,  Bruno Borovic

发明人： Joseph Seeger ,  Bruno Borovic

IPC分类号： G01C19/56

CPC分类号： G01C19/5719

摘要： A sensing frame that moves in response to torque generated by the Coriolis acceleration on a drive subsystem is disclosed. The sensing frame include a first rail. The first rail is constrained to move along the first axis parallel to the first rail. The frame includes a second rail substantially parallel to said first rail. The second rail is constrained to move along the first axis. The frame includes a base and at least two guiding arms for ensuring that the first rail and the second rail move in anti-phase fashion along the first axis. A first guiding arm is flexibly coupled to the first rail and flexibly coupled to the second rail and a second guiding arm is flexibly coupled to the first rail and flexibly coupled to the second rail. The first guiding arm is flexibly suspended to the base at a first anchoring point for allowing rotation of the first guiding arm around the second axis that is perpendicular to the first axis and normal to the plane, and the second guiding arm is suspended to the base at a second anchoring point allowing rotation of the second guiding arm around the third axis parallel to the second axis. The sensing frame includes a plurality of coupling flexures connecting said sensing frame to the drive subsystem and a transducer for sensing motion of the first and second rails responsive to said angular velocity.

摘要翻译： 公开了响应由驱动子系统上的科里奥利加速度产生的扭矩移动的感测框架。 感测框架包括第一轨道。 第一轨道被限制为沿着平行于第一轨道的第一轴线移动。 框架包括基本上平行于所述第一轨道的第二轨道。 第二个轨道被限制为沿着第一个轴线移动。 框架包括底座和至少两个引导臂，用于确保第一轨道和第二轨道沿着第一轴线以相位方式移动。 第一引导臂柔性地联接到第一轨道并且柔性地联接到第二轨道，并且第二引导臂被柔性地联接到第一轨道并且柔性地联接到第二轨道。 第一引导臂在第一锚固点处被柔性地悬挂到基部，以允许第一引导臂围绕垂直于第一轴线并垂直于平面的第二轴线旋转，并且第二引导臂悬挂到基座 在第二锚固点处允许第二引导臂围绕平行于第二轴线的第三轴线旋转。 感测框架包括将所述感测框架连接到驱动子系统的多个联接弯曲件，以及响应于所述角速度感测第一和第二轨道的运动的换能器。

公开(公告)号：US20100071467A1

公开(公告)日：2010-03-25

申请号：US12236757

申请日：2008-09-24

申请人： STEVE NASIRI ,  JOSEPH SEEGER ,  BRUNO BOROVIC ,  GOKSEN YARALIOGLU

发明人： STEVE NASIRI ,  JOSEPH SEEGER ,  BRUNO BOROVIC ,  GOKSEN YARALIOGLU

IPC分类号： G01C19/56

CPC分类号： G01C19/5719

摘要： A system and method describes an inertial sensor assembly, the assembly comprises a substrate parallel to the plane, at least one in-plane angular velocity sensor comprising a pair proof masses that are oscillated in anti-phase fashion along an axis normal to the plane. The first in-plane angular velocity sensor further includes a sensing frame responsive to the angular velocity of the substrate around the first axis parallel to the plane and perpendicular to the axis normal to the plane. The assembly also includes at least one out-of-plane angular velocity sensor comprising a pair of proof masses that are oscillated in anti-phase fashion in the plane parallel to the plane. The out-of-plane angular velocity sensor further comprises a sensing frame responsive to the angular velocity of the substrate around the axis normal to the plane.

摘要翻译： 一种系统和方法描述了惯性传感器组件，该组件包括平行于该平面的基底，至少一个平面内角速度传感器包括沿垂直于该平面的轴以反相方式摆动的一对检验质量块。 第一平面角速度传感器还包括响应于平行于平面并且垂直于垂直于平面的轴线的第一轴线周围的基板的角速度的感测框架。 组件还包括至少一个平面外的角速度传感器，其包括在平行于平面的平面中以反相方式振荡的一对校验质量块。 平面外角速度传感器还包括响应于垂直于平面的轴线的基板的角速度的感测框架。

公开(公告)号：US08539835B2

公开(公告)日：2013-09-24

申请号：US13427784

申请日：2012-03-22

申请人： Joseph Seeger ,  Bruno Borovic

发明人： Joseph Seeger ,  Bruno Borovic

IPC分类号： G01C19/56

CPC分类号： G01C19/5719

摘要： A sensing frame is disclosed. The sensing frame includes a first rail and a second rail. The first and second rails are constrained to move along a first axis parallel to the first and second rails. The frame includes a base and at least two guiding arms for ensuring that the first rail and the second rail move in anti-phase fashion along the first axis. First and second guiding arms are flexibly coupled to the first rail and second rail. The first guiding arm is flexibly suspended to the base at first anchoring points for allowing rotation of the first guiding arm, and the second guiding arm is suspended to the base at a second anchoring point allowing rotation of the second guiding arm. The sensing frame includes a plurality of coupling flexures and a transducer for sensing motion of the first and second rails.

摘要翻译： 公开了一种感测框架。 感测框架包括第一轨道和第二轨道。 第一轨道和第二轨道被限制为沿着平行于第一轨道和第二轨道的第一轴线移动。 框架包括底座和至少两个引导臂，用于确保第一轨道和第二轨道沿着第一轴线以相位方式移动。 第一和第二引导臂柔性地联接到第一轨道和第二轨道。 第一引导臂在第一锚固点处被柔性地悬挂到基部，以允许第一引导臂的旋转，并且第二引导臂在允许第二引导臂旋转的第二锚定点处悬挂到基部。 感测框架包括多个耦合弯曲部和用于感测第一和第二导轨的运动的换能器。

公开(公告)号：US20110061460A1

公开(公告)日：2011-03-17

申请号：US12558398

申请日：2009-09-11

申请人： JOSEPH SEEGER ,  BRUNO BOROVIC

发明人： JOSEPH SEEGER ,  BRUNO BOROVIC

IPC分类号： G01C19/56

CPC分类号： G01C19/5712 ,  G01C19/56 ,  G01C19/5719 ,  G01C19/574

摘要： An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting from motion of the masses and angular velocity about at least one input axis of the sensor. Additional embodiments can include a linkage that constrains the masses to move in the extension mode.

摘要翻译： 包括驱动器扩展模式的角速度传感器。 一方面，角速度传感器包括基部和基本上设置在平行于基部的平面中的至少三个质量，质量块具有质心。 至少一个致动器以延伸模式驱动质量，使得在延伸模式中，质量在平面中同时移动或同时移向质心。 至少一个换能器感测由质量的运动和围绕传感器的至少一个输入轴的角速度产生的至少一个科里奥利力。 另外的实施例可以包括限制质量以伸展模式移动的连杆。

公开(公告)号：US07863698B2

公开(公告)日：2011-01-04

申请号：US12418554

申请日：2009-04-03

申请人： Joseph Seeger ,  Goksen G. Yaralioglu ,  Bruno Borovic ,  Alexander Castro

发明人： Joseph Seeger ,  Goksen G. Yaralioglu ,  Bruno Borovic ,  Alexander Castro

IPC分类号： H01L29/84

CPC分类号： B81C1/00039 ,  B81B2203/0307

摘要： An anchoring assembly for anchoring MEMS device is disclosed. The anchoring assembly comprises: a top substrate; a bottom substrate substantially parallel to the top substrate; and a first portion of the anchor between the top substrate and the bottom substrate. The first portion of the anchor is rigidly connected to the top substrate; and the first portion of the anchor is rigidly connected to the bottom substrate. A second portion of the anchor is between the top substrate and the bottom substrate. The second portion of the anchor is rigidly connected to the top substrate; the second portion of the anchor being an anchoring point for the MEMS device. A substantially flexible mechanical element coupling the first portion of the anchor and the second portion of the anchor; the flexible element providing the electrical connection between the first portion of the anchor and the second portion of the anchor.

摘要翻译： 公开了一种用于锚定MEMS装置的锚固组件。 锚固组件包括：顶部基底; 基本上平行于顶部衬底的底部衬底; 以及锚固件在顶部基底和底部基底之间的第一部分。 锚的第一部分刚性地连接到顶部基底; 并且锚的第一部分刚性地连接到底部基底。 锚的第二部分在顶部基底和底部基底之间。 锚的第二部分刚性地连接到顶部基底; 锚的第二部分是用于MEMS装置的锚定点。 将锚固件的第一部分和锚固件的第二部分联接的基本上柔性的机械元件; 所述柔性元件提供所述锚固件的第一部分和所述锚固件的第二部分之间的电连接。

公开(公告)号：US20070267939A1

公开(公告)日：2007-11-22

申请号：US11436411

申请日：2006-05-18

申请人： Bruno Borovic ,  Frank L. Lewis ,  Ai Qun Liu ,  Dan O. Popa

发明人： Bruno Borovic ,  Frank L. Lewis ,  Ai Qun Liu ,  Dan O. Popa

IPC分类号： H02N1/00

CPC分类号： H02N1/008 ,  H02K2201/18

摘要： Methods and apparatuses for sensing and adjusting lateral motion in a comb drive actuated MEMS device are provided. If lateral motion is sensed by a lateral motion sensor coupled to the comb drive actuated MEMS device, and the lateral motion is greater than a reference value, a feedback controller adjusts the lateral motion by providing a drive signal to a comb drive electrode of a comb drive actuator.

摘要翻译： 提供了用于感测和调节梳状驱动MEMS装置中的横向运动的方法和装置。 如果通过耦合到梳状驱动的MEMS装置的横向运动传感器感测到侧向运动，并且横向运动大于参考值，则反馈控制器通过向梳子的梳状驱动电极提供驱动信号来调节横向运动 驱动执行器。