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    Robotic device for substrate transfer applications
    1.
    发明授权
    Robotic device for substrate transfer applications 有权
    用于衬底转移应用的机器人装置

    公开(公告)号：US08936293B2

    公开(公告)日：2015-01-20

    申请号：US13333688

    申请日：2011-12-21

    申请人： Christopher O. Lada ,  Stuart Stephen Papworth Parkin ,  Mahesh Govind Samant

    发明人： Christopher O. Lada ,  Stuart Stephen Papworth Parkin ,  Mahesh Govind Samant

    IPC分类号： B66F19/00

    CPC分类号： H01L21/67742 ,  H01L21/68707

    摘要： A device for use in the semiconductor industry includes a robotic arm whose end effector includes electromagnetic means to hold a substrate carrier. A pushing member can move independently of a flat, spatula-like portion of the device and is configured to exert force against the substrate carrier while the spatula-like portion is retracted from the substrate carrier, after the substrate carrier has been brought to its intended position. In this manner, the position of the substrate carrier is maintained at its intended position as the spatula-like portion is retracted.

    摘要翻译： 用于半导体工业的器件包括机器人臂，其末端执行器包括用于保持衬底载体的电磁装置。 推动构件可以独立于装置的平坦的刮铲状部分移动，并且构造成在基板载体已经达到其预期之后，当刮板状部分从基板载体缩回时，向基板载体施加力 位置。 以这种方式，当刮刀状部分缩回时，基板载体的位置保持在其预定位置。

    ROBOTIC DEVICE FOR SUBSTRATE TRANSFER APPLICATIONS
    2.
    发明申请
    ROBOTIC DEVICE FOR SUBSTRATE TRANSFER APPLICATIONS 有权
    用于基板传送应用的机器人设备

    公开(公告)号：US20130164113A1

    公开(公告)日：2013-06-27

    申请号：US13333688

    申请日：2011-12-21

    申请人： CHRISTOPHER O. LADA ,  STUART STEPHEN PAPWORTH PARKIN ,  MAHESH GOVIND SAMANT

    发明人： CHRISTOPHER O. LADA ,  STUART STEPHEN PAPWORTH PARKIN ,  MAHESH GOVIND SAMANT

    IPC分类号： H01L21/687

    CPC分类号： H01L21/67742 ,  H01L21/68707

    摘要： A device for use in the semiconductor industry includes a robotic arm whose end effector includes electromagnetic means to hold a substrate carrier. A pushing member can move independently of a flat, spatula-like portion of the device and is configured to exert force against the substrate carrier while the spatula-like portion is retracted from the substrate carrier, after the substrate carrier has been brought to its intended position. In this manner, the position of the substrate carrier is maintained at its intended position as the spatula-like portion is retracted.

    摘要翻译： 用于半导体工业的器件包括机器人臂，其末端执行器包括用于保持衬底载体的电磁装置。 推动构件可以独立于装置的平坦的刮铲状部分移动，并且构造成在基板载体已经达到其预期之后，当刮板状部分从基板载体缩回时，向基板载体施加力 位置。 以这种方式，当刮刀状部分缩回时，基板载体的位置保持在其预定位置。

    End effector for substrate handling and method for making the same
    6.
    发明授权
    End effector for substrate handling and method for making the same 失效
    用于底物处理的末端执行器及其制造方法

    公开(公告)号：US6073828A

    公开(公告)日：2000-06-13

    申请号：US107917

    申请日：1998-06-30

    申请人： Edmund L. Ma ,  Christopher O. Lada ,  Donald H. Langhans

    发明人： Edmund L. Ma ,  Christopher O. Lada ,  Donald H. Langhans

    IPC分类号： H01L21/687 ,  B23K31/00

    CPC分类号： H01L21/68707

    摘要： An end effector has a tower with non-stacked spatulas. Tolerance stacking is avoided by making grooves in the tower relative to a common reference surface, and mounting the spatulas in such grooves. The grooves are provided in separate planar walls of the tower. The walls intersect to enhance the structural properties of the tower. The tower has a dual-purpose clamp formed integrally with one wall for use in assembling the tower and the spatulas, and for mounting the completed end effector in a load lock. The spatula may carry a wafer during various operations, e.g., semiconductor processing, material deposition and etching systems, or in flat panel display processing systems. The carrying of the wafers is notwithstanding vibration of equipment for performing the manufacturing operations, which vibration is primarily in a range of frequencies. Each spatula is formed with a planar platform having an aperture formed therein such that the platform carrying the wafer has a resonant frequency dimensioned so that the resonant frequency while carrying the wafer is outside of the range of frequencies of the equipment vibration. Holes are provided around the aperture, and the spatula is provided with a pad for assembly with each of the holes. Each of the pads has a wafer support surface and a plurality of legs depending from the support surface. The legs are flexed to permit reception of the pad in one of the holes. Methods are disclosed for making the tower, the spatulas, and the end effector with these features.

    摘要翻译： 末端执行器具有具有非堆叠刮刀的塔。 通过在塔中相对于公共参考表面形成凹槽并将刮刀安装在这种凹槽中来避免公差堆叠。 凹槽设置在塔的分开的平面壁中。 墙壁相交以增强塔的结构性能。 该塔具有与一个壁一体形成的双重用途的夹具，用于组装塔和刮铲，并将完整的末端执行器安装在装载锁中。 刮刀可以在各种操作（例如半导体处理，材料沉积和蚀刻系统）或平板显示处理系统中承载晶片。 尽管用于执行制造操作的设备的振动，晶片的携带也是如此，该振动主要在一定频率范围内。 每个刮刀形成有平面平台，其具有形成在其中的孔，使得承载晶片的平台具有谐振频率的尺寸，使得承载晶片的谐振频率在设备振动的频率范围之外。 孔设置在孔的周围，并且刮刀设置有用于与每个孔组装的垫。 每个焊盘具有晶片支撑表面和从支撑表面悬垂的多个支脚。 腿弯曲以允许在其中一个孔中接收垫。 公开了用于制造具有这些特征的塔，刮铲和末端执行器的方法。

    Apparatus for feeding distinct feed stock and maintaining the alignment of printable stock in a roller driven tray information transfer device
    7.
    发明授权
    Apparatus for feeding distinct feed stock and maintaining the alignment of printable stock in a roller driven tray information transfer device 失效
    用于馈送不同原料并将可印刷原料保持在辊驱动托盘信息传送装置中的装置

    公开(公告)号：US5775684A

    公开(公告)日：1998-07-07

    申请号：US545895

    申请日：1995-10-20

    申请人： Richard C. Jackson ,  John Avery Howard ,  Christopher O. Lada ,  Donald S. Minami ,  Lan Hao-Jui ,  Tsai Cheng-Liang

    发明人： Richard C. Jackson ,  John Avery Howard ,  Christopher O. Lada ,  Donald S. Minami ,  Lan Hao-Jui ,  Tsai Cheng-Liang

    IPC分类号： B65H3/06 ,  B65H3/44 ,  B65H9/10

    CPC分类号： B65H3/44 ,  B65H3/0661 ,  B65H9/101 ,  B65H2301/42328

    摘要： Apparatus for feeding distinct feed stock through a roller driven tray device to an information transfer device (i.e., scanning, facsimile, printing, copying) or a multipurpose information transfer device for processing feed stock, the roller driven tray device comprising a first tray and a second tray each tray capable of holding an item of feed stock for processing through the same port of an information transfer device from either tray without manual intervention. Also, an apparatus for maintaining alignment of feed stock in a roller driven tray device comprising a cam radially coupled to the first end of the roller shaft, a cam follower seated on the cam, a cam shaft with one end coupled to the cam follower and a second end slidably coupled to the tray housing, and a cantilever finger crank coupled to the cam shaft, and having a first position to not impede the path of the feed stock and a second position against the feed stock.

    摘要翻译： 用于将不同的原料通过辊驱动盘装置输送到信息传送装置（即，扫描，传真，打印，复印）或用于处理原料的多功能信息传送装置的装置，所述辊驱动盘装置包括第一托盘和 第二托盘，每个托盘能够通过来自任一托盘的信息传送装置的相同端口保持用于处理的料品，而无需手动干预。 此外，一种用于保持辊驱动盘装置中的原料对准的装置，包括径向耦合到辊轴的第一端的凸轮，位于凸轮上的凸轮从动件，一端联接到凸轮从动件的凸轮轴， 可滑动地联接到所述托盘壳体的第二端以及联接到所述凸轮轴的悬臂式手指曲柄，并且具有第一位置以不阻碍所述馈电线的路径和抵靠所述馈电线的第二位置。

    ROBOTIC DEVICE FOR SUBSTRATE TRANSFER APPLICATIONS
    8.
    发明申请
    ROBOTIC DEVICE FOR SUBSTRATE TRANSFER APPLICATIONS 有权
    用于基板传送应用的机器人设备

    公开(公告)号：US20120256435A1

    公开(公告)日：2012-10-11

    申请号：US13084435

    申请日：2011-04-11

    申请人： DAVID J. ALTKNECHT ,  ROBERT E. ERICKSON ,  STUART STEPHEN PAPWORTH PARKIN ,  CHRISTOPHER O. LADA ,  MAHESH SAMANT

    发明人： DAVID J. ALTKNECHT ,  ROBERT E. ERICKSON ,  STUART STEPHEN PAPWORTH PARKIN ,  CHRISTOPHER O. LADA ,  MAHESH SAMANT

    IPC分类号： H01L21/68 ,  H01L21/677

    CPC分类号： H01L21/67742

    摘要： A device for use in the semiconductor industry includes a robotic arm whose end effector includes at least two prongs designed to hold a substrate carrier. A pushing member located between the prongs can move independently of the prongs and is configured to exert force against the substrate carrier while the prongs are retracted from the substrate carrier, after the substrate carrier has been brought to its intended position. In this manner, the position of the substrate carrier is maintained at its intended position as the prongs are retracted. Each of the prongs may include a claw or gripping member for grasping the substrate carrier.

    摘要翻译： 用于半导体工业的器件包括机器人臂，其末端执行器包括设计成保持衬底载体的至少两个插脚。 位于插脚之间的推动构件可以独立于插脚移动，并且被构造成在衬底载体已经达到其预定位置之后，当插脚从衬底载体缩回时，对衬底载体施加力。 以这种方式，当叉头缩回时，基板载体的位置保持在其预定位置。 每个插脚可以包括用于抓握衬底载体的爪或夹持构件。

    Telephone headset
    9.
    发明授权
    Telephone headset 失效
    电话耳机

    公开(公告)号：US06377684B1

    公开(公告)日：2002-04-23

    申请号：US09591881

    申请日：2000-06-12

    申请人： Robert E. Lucey ,  John Ela ,  Christopher O. Lada ,  Lawrence G. Shubert ,  Christopher Loew

    发明人： Robert E. Lucey ,  John Ela ,  Christopher O. Lada ,  Lawrence G. Shubert ,  Christopher Loew

    IPC分类号： H04M100

    CPC分类号： H04R1/1066 ,  H04M1/05 ,  H04R1/105 ,  H04R1/1058 ,  H04R2201/107

    摘要： A telephone headset including a boom microphone, a earphone, and an ear support constructed and arranged to be adjustable and comfortable for a wearer. The headset is configured with an adjustable ear support to fit a variety of ear sizes without affecting the balance of the ear support on the ear of the wearer. The ear support includes a rotational hinge which is biased into a given position by a compression washer. The earphone is removably and adjustably attached to a mounting ring which in turn is movably attached to the ear support by a spring biased ball and socket joint. The combination of flexible joints and removability of the earphone provides the degrees of freedom and stiction necessary to permit the earphone to be worn comfortably on either ear of the wearer. A strain relief for the electrical connections is attached to the earphone which directs the electrical connections toward the plane of the head, thereby eliminating a torque which otherwise would tend to dislodge the ear support from the ear. The earphone includes a series of openings in its rear surface to maximize its acoustics. The boom microphone includes a spring biased ball and socket joint to movably fix the orientation of the microphone with respect to the wearer to a good comfort level. The boom microphone ball and socket joint is configured with a tab and stop to prohibit 360 degree rotation of the boom to prevent strain on the electrical connections to the microphone.

    摘要翻译： 一种电话耳机，包括吊杆麦克风，耳机和耳罩，其构造和布置成可佩戴者可调和舒适。 耳机配置有可调节的耳朵支架以适应各种耳朵尺寸，而不影响佩戴者耳朵上耳朵支撑的平衡。 耳托包括通过压缩垫圈偏压到给定位置的旋转铰链。 耳机可拆卸地可调节地附接到安装环，该安装环又通过弹簧偏压的球窝接头可移动地附接到耳朵支撑件。 柔性接头的组合和耳机的可移除性提供了允许耳机舒适佩戴在佩戴者的任一耳上所必需的自由度和静止度。 用于电连接的应变消除被附接到耳机，耳机将电连接引导到头部的平面，从而消除了否则会将耳朵支撑从耳朵移开的扭矩。 耳机在其后表面包括一系列开口以最大化其声学效果。 吊杆麦克风包括弹簧偏置的球窝接头，以相对于穿着者可移动地固定麦克风的方向以达到良好的舒适度。 吊杆式麦克风球窝接头配置有接头并停止以防止吊杆360度旋转，以防止对麦克风的电气连接造成压力。

    Scanning force microscope probe cantilever with reflective structure
    10.
    发明授权
    Scanning force microscope probe cantilever with reflective structure 失效
    扫描力显微镜探针悬臂与反射结构

    公开(公告)号：US06298715B1

    公开(公告)日：2001-10-09

    申请号：US09471467

    申请日：1999-12-22

    申请人： Douglas J. Thomson ,  Christopher O. Lada

    发明人： Douglas J. Thomson ,  Christopher O. Lada

    IPC分类号： G01B528

    CPC分类号： G01Q20/02 ,  Y10S977/87

    摘要： A scanning force microscope probe cantilever having a reflective structure. In one embodiment, the described scanning force microscope probe cantilever includes a reflective structure on the cantilever. In one embodiment, light is directed to the reflective structure on the cantilever in a direction having a directional component from a fixed end to a free end of the cantilever. In one embodiment, light is reflected from the reflective structure in a direction having a directional component from the free end to a fixed end of the cantilever.

    摘要翻译： 具有反射结构的扫描力显微镜探针悬臂。 在一个实施例中，所述扫描力显微镜探针悬臂包括在悬臂上的反射结构。 在一个实施例中，光从具有定向分量的方向被引导到悬臂上的反射结构，该方向分量从固定端到悬臂的自由端。 在一个实施例中，光从具有方向分量的方向从反射结构反射从自由端到悬臂的固定端。