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    Method of manufacturing inkjet print head
    1.
    发明授权
    Method of manufacturing inkjet print head 失效
    制造喷墨打印头的方法

    公开(公告)号：US07895750B2

    公开(公告)日：2011-03-01

    申请号：US11875106

    申请日：2007-10-19

    申请人： Byung Ha Park ,  Sung Joon Park ,  Young Ung Ha ,  Kyong Il Kim

    发明人： Byung Ha Park ,  Sung Joon Park ,  Young Ung Ha ,  Kyong Il Kim

    IPC分类号： B23P17/00 ,  G01D15/00 ,  B41J2/045

    CPC分类号： B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1639 ,  B41J2/1642 ,  Y10T29/49124 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49146 ,  Y10T29/49401

    摘要： A method of manufacturing an inkjet print head that includes an improved process of forming an ink feed hole, thereby enabling an increase in productivity and a favorable ink supply via the ink feed hole. The method includes preparing a substrate on which a heater to heat an ink is formed on the front side thereof, forming a flow passage formation layer on the front side of the substrate such that the flow passage formation layer defines an ink flow passage, forming a nozzle layer provided with a nozzle on the flow passage formation layer, forming a first protective layer such that the first protective layer covers the flow passage formation layer and the nozzle layer, applying a mask material used to etch the substrate to the rear side of the substrate, applying a second protective layer to the lateral side of the substrate to protect the lateral side of the substrate, and forming an ink feed hole on the substrate by wet etching. Tantalum (Ta) is used as the mask material. Parylene is used as the second protective layer.

    摘要翻译： 一种制造喷墨打印头的方法，其包括形成供墨孔的改进方法，从而能够提高生产率并且通过供墨孔提供良好的供墨。 该方法包括：准备在其前侧形成有加热油墨的加热器的基板，在基板的前侧形成流路形成层，使得流路形成层限定油墨流路，形成 喷嘴层，其在流路形成层上设置有喷嘴，形成第一保护层，使得第一保护层覆盖流路形成层和喷嘴层，将用于蚀刻基板的掩模材料施加到第二保护层的背面 衬底，将第二保护层施加到衬底的侧面以保护衬底的侧面，以及通过湿蚀刻在衬底上形成供墨孔。 使用钽（Ta）作为掩模材料。 聚对二甲苯用作第二保护层。

    Method of fabricating ink jet head and ink jet head fabricated thereby
    2.
    发明授权
    Method of fabricating ink jet head and ink jet head fabricated thereby 有权
    制造由此制造的喷墨头和喷墨头的方法

    公开(公告)号：US07517051B2

    公开(公告)日：2009-04-14

    申请号：US11035894

    申请日：2005-01-18

    申请人： Kyong-il Kim ,  Sungjoon Park

    发明人： Kyong-il Kim ,  Sungjoon Park

    IPC分类号： B41J2/16

    CPC分类号： B41J2/1645 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1639

    摘要： A method of fabricating an ink jet head and an ink jet head fabricated thereby. The method includes preparing a substrate having a flow path region, a flow path structure region to define the flow path region, and a pad region disposed at edge portions of the substrate. At least one pressure-generating element to eject ink is formed on the substrate of the flow path region. An inserting material layer is formed on an entire surface of the substrate having the at least one pressure-generating element. The inserting material layer is patterned to form an inserting layer on the flow path structure region. A mold layer is formed on the substrate having the inserting layer to cover the flow path region. Next, a nozzle material layer is formed on the entire surface of the substrate having the inserting layer and the mold layer. The nozzle material layer is patterned to form a nozzle layer covering the inserting layer and the mold layer and having at least one nozzle passing through the nozzle material layer on the mold layer to correspond to the at least one pressure-generating element.

    摘要翻译： 一种制造喷墨头的方法和由此制造的喷墨头。 该方法包括制备具有流路区域的基板，限定流路区域的流路结构区域和设置在基板的边缘部分处的焊盘区域。 在流路区域的基板上形成至少一个用于喷射墨的压力产生元件。 在具有至少一个压力产生元件的基板的整个表面上形成插入材料层。 将插入材料层图案化以在流路结构区域上形成插入层。 在具有插入层的基板上形成覆盖流路区域的模层。 接下来，在具有插入层和模制层的基板的整个表面上形成喷嘴材料层。 图案化喷嘴材料层以形成覆盖插入层和模具层的喷嘴层，并且具有通过模层上的喷嘴材料层的至少一个喷嘴以对应于至少一个产生压力的元件。

    INKJET PRINTHEAD AND METHOD OF MANUFACTURING THE SAME
    4.
    发明申请
    INKJET PRINTHEAD AND METHOD OF MANUFACTURING THE SAME 失效
    喷墨打印机及其制造方法

    公开(公告)号：US20090058952A1

    公开(公告)日：2009-03-05

    申请号：US12036333

    申请日：2008-02-25

    申请人： Sung-joon PARK ,  Myong-jong KWON ,  Kyong-il KIM

    发明人： Sung-joon PARK ,  Myong-jong KWON ,  Kyong-il KIM

    IPC分类号： B41J2/05

    CPC分类号： B41J2/1603 ,  B41J2/1404 ,  B41J2/1626 ,  B41J2/1632 ,  B41J2/1639 ,  B41J2202/03

    摘要： Provided are an inkjet printhead and a method of manufacturing the same. The inkjet printhead includes: a substrate, on which a plurality of heaters for heating ink to generated ink bubbles are formed; a chamber layer including a plurality of ink chambers formed on the substrate; and a nozzle layer including a plurality of nozzles formed on the chamber layer. In addition, at least one of the chamber layer and the nozzle layer is formed of an imide silicone resin.

    摘要翻译： 提供一种喷墨打印头及其制造方法。 喷墨打印头包括：基板，其上形成有用于加热油墨以产生的油墨气泡的多个加热器; 包括形成在所述基板上的多个墨室的室层; 以及喷嘴层，其包括形成在所述室层上的多个喷嘴。 此外，室层和喷嘴层中的至少一个由酰亚胺硅树脂形成。

    Ink jet head including a metal chamber layer and a method of fabricating the same
    5.
    发明授权
    Ink jet head including a metal chamber layer and a method of fabricating the same 失效
    包括金属室层的喷墨头及其制造方法

    公开(公告)号：US07465403B2

    公开(公告)日：2008-12-16

    申请号：US11063993

    申请日：2005-02-24

    申请人： Kyong-il Kim ,  Yong-shik Park ,  Myong-jong Kwon

    发明人： Kyong-il Kim ,  Yong-shik Park ,  Myong-jong Kwon

    IPC分类号： G01D15/00 ,  G11B5/127

    CPC分类号： B41J2/1404 ,  B41J2/1603 ,  B41J2/1625 ,  B41J2/1643 ,  Y10T29/49401

    摘要： A method of fabricating an ink jet head having a metal chamber layer includes preparing a substrate having pressure-generating elements to generate pressure to eject ink ejection. The metal chamber layer to define sidewalls of an ink flow path is then formed on the substrate. A sacrificial layer is formed to fill a region where the ink flow path is to be formed between the sidewalls defined by the metal chamber layer. A nozzle layer having nozzles corresponding to the pressure-generating elements is formed on the metal chamber layer and the sacrificial layer.

    摘要翻译： 制造具有金属室层的喷墨头的方法包括制备具有压力产生元件的基板以产生喷射喷墨的压力。 然后在衬底上形成用于限定墨水流路的侧壁的金属室层。 形成牺牲层以填充在由金属室层限定的侧壁之间形成油墨流动路径的区域。 在金属室层和牺牲层上形成具有对应于压力产生元件的喷嘴的喷嘴层。

    METHOD OF MANUFACTURING THERMAL INKJET PRINTHEAD
    6.
    发明申请
    METHOD OF MANUFACTURING THERMAL INKJET PRINTHEAD 审中-公开
    制造热喷头的方法

    公开(公告)号：US20080283494A1

    公开(公告)日：2008-11-20

    申请号：US11874551

    申请日：2007-10-18

    申请人： Il-woo Kim ,  Jin-wook Lee ,  Byung-ha Park ,  Myong-jong Kwon ,  Kyong-il Kim ,  Hye-young Min

    发明人： Il-woo Kim ,  Jin-wook Lee ,  Byung-ha Park ,  Myong-jong Kwon ,  Kyong-il Kim ,  Hye-young Min

    IPC分类号： G11B5/127

    CPC分类号： B41J2/1632 ,  B41J2/1603 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1645 ,  B41J2202/11

    摘要： A method of manufacturing a thermal inkjet printhead. The method includes forming on a substrate a chamber layer having an ink chamber, forming a sacrificial layer on the chamber layer wherein the sacrificial layer fills the ink chamber, and planarizing a top surface of the sacrificial layer and of the chamber layer using a primary Chemical Mechanical Polishing (CMP) process until the sacrificial layer and the chamber layer attain a desired height, wherein a slurry is used in the primary CMP process that includes polishing particles having an average particle size of 500 nm˜2 μm.

    摘要翻译： 一种制造热喷墨打印头的方法。 该方法包括在基底上形成具有墨水室的腔室层，在腔室层上形成牺牲层，其中牺牲层填充墨水腔，以及使用主要化学物质对牺牲层和腔室层的顶表面进行平坦化 机械抛光（CMP）工艺直到牺牲层和室层达到期望的高度，其中在包括平均粒度为500nm〜2μm的抛光颗粒的初级CMP工艺中使用浆料。

    METHOD OF MANUFACTURING INKJET PRINTHEAD USING CROSSLINKED POLYMER
    7.
    发明申请
    METHOD OF MANUFACTURING INKJET PRINTHEAD USING CROSSLINKED POLYMER 审中-公开
    使用交联聚合物制造喷嘴的方法

    公开(公告)号：US20070256301A1

    公开(公告)日：2007-11-08

    申请号：US11772541

    申请日：2007-07-02

    申请人： Byung-ha PARK ,  Young-ung Ha ,  Sung-joon Park ,  Jae-sik Min ,  Kyong-il Kim

    发明人： Byung-ha PARK ,  Young-ung Ha ,  Sung-joon Park ,  Jae-sik Min ,  Kyong-il Kim

    IPC分类号： B21D53/78

    CPC分类号： B41J2/1603 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  Y10T29/49401

    摘要： Provided is a method of manufacturing an inkjet printhead. The method includes: preparing a substrate having thereon a heater for heating ink and an electrode for supplying current to the heater; applying a negative photoresist composition to the substrate having thereon the heater and the electrode and patterning the same to form a passage forming layer that surrounds an ink passage; patterning the substrate having thereon the passage forming layer by photolithography at least twice to form a sacrificial layer having a planarized upper surface in a space surrounded by the passage forming layer; applying the negative photoresist composition to the passage forming layer and the sacrificial layer and patterning the same to form a nozzle layer having a nozzle; etching the substrate from the rear surface thereof to be perforated to form an ink supply hole; and removing the sacrificial layer, wherein the negative photoresist composition includes a prepolymer that has a glycidyl ether functional group or a ring-opened glycidyl ether functional group on monomer repeating units thereof and a phenolic novolak resin-based backbone, a bisphenol A-based backbone, or an alicyclic-based backbone. The sacrificial layer may be planarized using a chemical mechanical polishing process. Therefore, an upper surface of the sacrificial layer can be planarized, and thus, it is possible to easily control a shape and dimension of an ink passage, thereby improving uniformity of the ink passage.

    摘要翻译： 提供一种制造喷墨打印头的方法。 该方法包括：制备其上具有用于加热油墨的加热器和用于向加热器供应电流的电极的基板; 在其上具有加热器和电极的基板上施加负性光致抗蚀剂组合物并将其图案化，以形成围绕墨水通道的通道形成层; 通过光刻将其上具有通道形成层的基板图案化至少两次，以在由通道形成层包围的空间中形成具有平坦化的上表面的牺牲层; 将所述负性光致抗蚀剂组合物施加到所述通道形成层和所述牺牲层并且将其图案化以形成具有喷嘴的喷嘴层; 从其背面蚀刻基板以进行穿孔以形成供墨孔; 并且除去牺牲层，其中负性光致抗蚀剂组合物包含在其单体重复单元上具有缩水甘油醚官能团或开环缩水甘油醚官能团的预聚物和酚醛清漆树脂基骨架，双酚A基骨架 ，或脂环族骨架。 牺牲层可以使用化学机械抛光工艺进行平面化。 因此，可以使牺牲层的上表面平坦化，从而可以容易地控制墨通道的形状和尺寸，从而提高墨通道的均匀性。

    Inkjet printer head and method of fabricating the same
    9.
    发明申请
    Inkjet printer head and method of fabricating the same 审中-公开
    喷墨打印头及其制造方法

    公开(公告)号：US20060044362A1

    公开(公告)日：2006-03-02

    申请号：US11059501

    申请日：2005-02-17

    申请人： Kyong-il Kim ,  Myong-jong Kwon ,  Kwang-ryul Kim ,  Nam-kyun Kim ,  Byung-ha Park ,  Yong-shik Park ,  Eun-bong Han ,  Young-ung Ha ,  Sung-joon Park ,  Jae-Sik Min

    发明人： Kyong-il Kim ,  Myong-jong Kwon ,  Kwang-ryul Kim ,  Nam-kyun Kim ,  Byung-ha Park ,  Yong-shik Park ,  Eun-bong Han ,  Young-ung Ha ,  Sung-joon Park ,  Jae-Sik Min

    IPC分类号： B41J2/05

    CPC分类号： B41J2/1631 ,  B41J2/14112 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1646

    摘要： An inkjet printer head and method of fabricating the same includes a substrate having an ink-feed hole formed at a bottom surface of the substrate, a lower chamber formed at a top surface of the substrate, and a restrictor to fluid communicate between the ink-feed hole and the lower chamber, an oxide layer formed on the substrate, a heater formed on the oxide layer and disposed parallel to the surface of the substrate to cross the lower chamber, a lead electrically connected to the heater, and a nozzle layer disposed on the heater to configure an ink channel together with the lower chamber and having a nozzle at an upper portion of the nozzle layer. The inkjet printer head is capable of improving a thermal efficiency by heating the ink using both surfaces of the heater since the heater is disposed at a center of the ink chamber, and improving characteristics of the heater by making a current density and a current flow uniform since the heater is formed in a straight line without any bent or curved portion.

    摘要翻译： 喷墨打印机头及其制造方法包括：基板，其具有形成在基板的底面的供墨孔，形成在基板的顶面的下室，以及限流器， 供给孔和下室，形成在基板上的氧化物层，形成在氧化物层上并且平行于基板的表面设置以跨越下部室的加热器，与该加热器电连接的引线以及设置在喷嘴层 在加热器上配置墨水通道与下部腔室并且在喷嘴层的上部具有喷嘴。 喷墨打印头能够通过使用加热器的两个表面加热墨水来提高热效率，因为加热器设置在墨水室的中心，并且通过使电流密度和电流流动均匀地提高加热器的特性 由于加热器形成为直线而没有任何弯曲或弯曲部分。