公开(公告)号：US20130126950A1

公开(公告)日：2013-05-23

申请号：US13304235

申请日：2011-11-23

申请人： Jun-Nan Nian ,  Li-Yen Fang ,  Yu-Ting Lin ,  Shih-Chieh Chang ,  Yu-Ku Lin ,  Ying-Lang Wang

发明人： Jun-Nan Nian ,  Li-Yen Fang ,  Yu-Ting Lin ,  Shih-Chieh Chang ,  Yu-Ku Lin ,  Ying-Lang Wang

IPC分类号： H01L29/772 ,  H01L21/28

CPC分类号： H01L23/53209 ,  H01L21/28518 ,  H01L29/665 ,  H01L29/6659 ,  H01L29/78 ,  H01L2924/0002 ,  H01L2924/00

摘要： A system and method for forming a semiconductor device is provided. An embodiment comprises forming a silicide region on a substrate along with a transition region between the silicide region and the substrate. The thickness of the silicide precursor material layer along with the annealing conditions are controlled such that there is a larger ratio of one atomic species within the transition region than another atomic species, thereby increasing the hole mobility within the transition region.

公开(公告)号：US08435893B1

公开(公告)日：2013-05-07

申请号：US13304235

申请日：2011-11-23

申请人： Jun-Nan Nian ,  Li-Yen Fang ,  Yu-Ting Lin ,  Shih-Chieh Chang ,  Yu-Ku Lin ,  Ying-Lang Wang

发明人： Jun-Nan Nian ,  Li-Yen Fang ,  Yu-Ting Lin ,  Shih-Chieh Chang ,  Yu-Ku Lin ,  Ying-Lang Wang

IPC分类号： H01L21/44

CPC分类号： H01L23/53209 ,  H01L21/28518 ,  H01L29/665 ,  H01L29/6659 ,  H01L29/78 ,  H01L2924/0002 ,  H01L2924/00

摘要： A system and method for forming a semiconductor device is provided. An embodiment comprises forming a silicide region on a substrate along with a transition region between the silicide region and the substrate. The thickness of the silicide precursor material layer along with the annealing conditions are controlled such that there is a larger ratio of one atomic species within the transition region than another atomic species, thereby increasing the hole mobility within the transition region.

摘要翻译： 提供一种用于形成半导体器件的系统和方法。 一个实施例包括在硅化物区域和衬底之间的过渡区域上形成衬底上的硅化物区域。 控制硅化物前体材料层的厚度以及退火条件，使得在过渡区域内的一种原子种类的比例比另一种原子种类更大，从而增加过渡区域内的空穴迁移率。