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公开(公告)号:US07573109B2
公开(公告)日:2009-08-11
申请号:US11528654
申请日:2006-09-28
申请人: Shinji Kunori , Hiroaki Shishido , Masato Mikawa , Kosuke Ohshima , Masahiro Kuriyama , Mizue Kitada
发明人: Shinji Kunori , Hiroaki Shishido , Masato Mikawa , Kosuke Ohshima , Masahiro Kuriyama , Mizue Kitada
IPC分类号: H01L29/76
CPC分类号: H01L29/7811 , H01L29/0619 , H01L29/0634 , H01L29/0696 , H01L29/0878 , H01L29/1095 , H01L29/47 , H01L29/66712 , H01L29/7395 , H01L29/7802 , H01L29/7809 , H01L2924/0002 , H01L2924/00
摘要: A semiconductor device having high withstand strength against destruction. The semiconductor device 1 includes guard buried regions 44b of second conductivity type concentrically provided on a resistance layer 15 of first conductivity type and base diffusion regions 17a are provided inside of the guard buried region 44b and base buried regions 44a of the second conductivity type are provided on the bottom surface of the base diffusion regions 17a. A distance between adjacent base buried regions 44a at the bottom of the same base diffusion region 17a is Wm1, a distance between adjacent base buried regions 44a at the bottom of the different base diffusion regions 17a is Wm2, and a distance between the guard buried regions 44b is WPE. A ratio of an impurity quantity Q1 of the first conductivity type and an impurity quantity Q2 of the second conductivity type included inside the widthwise center of the innermost guard buried region 44b is 0.90
摘要翻译: 具有高抗破坏性能的半导体器件。 半导体器件1包括同心地设置在第一导电类型的电阻层15上的第二导电类型的保护掩埋区域44b,并且在保护掩埋区域44b的内侧设置有基极扩散区域17a,并且设置第二导电类型的基极掩埋区域44a 在基底扩散区域17a的底面上。 在相同的基底扩散区域17a的底部的相邻的基底掩埋区域44a之间的距离为Wm1,不同的基底扩散区域17a的底部的相邻的基底掩埋区域44a之间的距离为Wm2, 44b是WPE。 当Wm1
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公开(公告)号:US20070069323A1
公开(公告)日:2007-03-29
申请号:US11528654
申请日:2006-09-28
申请人: Shinji Kunori , Hiroaki Shishido , Masato Mikawa , Kosuke Ohshima , Masahiro Kuriyama , Mizue Kitada
发明人: Shinji Kunori , Hiroaki Shishido , Masato Mikawa , Kosuke Ohshima , Masahiro Kuriyama , Mizue Kitada
IPC分类号: H01L23/58
CPC分类号: H01L29/7811 , H01L29/0619 , H01L29/0634 , H01L29/0696 , H01L29/0878 , H01L29/1095 , H01L29/47 , H01L29/66712 , H01L29/7395 , H01L29/7802 , H01L29/7809 , H01L2924/0002 , H01L2924/00
摘要: A semiconductor device having high withstand strength against destruction. The semiconductor device 1 includes guard buried regions 44b of second conductivity type concentrically provided on a resistance layer 15 of first conductivity type and base diffusion regions 17a are provided inside of the guard buried region 44b and base buried regions 44a of the second conductivity type are provided on the bottom surface of the base diffusion regions 17a. A distance between adjacent base buried regions 44a at the bottom of the same base diffusion region 17a is Wm1, a distance between adjacent base buried regions 44a at the bottom of the different base diffusion regions 17a is Wm2, and a distance between the guard buried regions 44b is WPE. A ratio of an impurity quantity Q1 of the first conductivity type and an impurity quantity Q2 of the second conductivity type included inside the widthwise center of the innermost guard buried region 44b is 0.90
摘要翻译: 具有高抗破坏性能的半导体器件。 半导体器件1包括同心地设置在第一导电类型的电阻层15上的第二导电类型的保护掩埋区域44b,并且在保护掩埋区域44b的内部设置基极扩散区域17a,并且在第二导电类型的第二导电类型的基极掩埋区域44a 导电类型设置在基底扩散区域17a的底表面上。 在相同的基底扩散区域17a的底部的相邻的基底掩埋区域44a之间的距离为W m 1,在不同的基底扩散区域17的底部的相邻的基底掩埋区域44a之间的距离 a是Wm 2 2,并且防护埋入区域44b之间的距离是W PE 2 SUB>。 第一导电类型的杂质量Q <1> 1和第二导电类型的杂质量Q 2> 2 sub>的比率包括在最内侧保护埋入区44的宽度方向中心的内侧 当Wm <1时,b是0.90
。 当W SUB> 1 SUB> 2 SUB>时,该比例为Q 2 / Q 1 /SUB><0.92当WM SUB> 2 SUB> PE SUB>时,该比例为1.10 / Q <1> SUB>。 -
公开(公告)号:US07282764B2
公开(公告)日:2007-10-16
申请号:US11481247
申请日:2006-07-06
申请人: Shinji Kunori , Hiroaki Shishido , Masato Mikawa , Kosuke Ohshima , Masahiro Kuriyama , Mizue Kitada
发明人: Shinji Kunori , Hiroaki Shishido , Masato Mikawa , Kosuke Ohshima , Masahiro Kuriyama , Mizue Kitada
IPC分类号: H01L29/76
CPC分类号: H01L29/7811 , H01L29/0634 , H01L29/0696 , H01L29/0878 , H01L29/1095 , H01L29/47 , H01L29/66712 , H01L29/7395 , H01L29/7802 , H01L29/7809
摘要: A semiconductor device having high ruggedness is provided. The distance Wm2 between buried regions, positioned at the bottoms of different base diffusion regions and face each other, is set smaller than the distance Wm1 between buried regions positioned at the bottom of the same base diffusion region (Wm1>Wm2). An avalanche breakdown occurs under the bottom of the base diffusion region, and the avalanche current is not passed through a high resistance part immediately under the source diffusion region in the base diffusion region, thereby providing high withstand strength against destruction.
摘要翻译: 提供了具有高耐久性的半导体器件。 位于不同基底扩散区域的底部并且彼此面对的掩埋区域之间的距离Wm2 <2>被设定为小于位于该掩埋区域的掩埋区域之间的距离Wm1 < 相同的基底扩散区域(Wm1 SUB> Wm2)的底部。 在基底扩散区域的底部发生雪崩击穿,并且雪崩电流不通过在基底扩散区域中的源极扩散区域的正下方的高电阻部分,从而提供高的抗破坏强度。
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公开(公告)号:US20070045776A1
公开(公告)日:2007-03-01
申请号:US11481247
申请日:2006-07-06
申请人: Shinji Kunori , Hiroaki Shishido , Masato Mikawa , Kosuke Ohshima , Masahiro Kuriyama , Mizue Kitada
发明人: Shinji Kunori , Hiroaki Shishido , Masato Mikawa , Kosuke Ohshima , Masahiro Kuriyama , Mizue Kitada
IPC分类号: H01L31/11
CPC分类号: H01L29/7811 , H01L29/0634 , H01L29/0696 , H01L29/0878 , H01L29/1095 , H01L29/47 , H01L29/66712 , H01L29/7395 , H01L29/7802 , H01L29/7809
摘要: A semiconductor device having high ruggedness is provided. The distance Wm2 between buried regions, positioned at the bottoms of different base diffusion regions and face each other, is set smaller than the distance Wm1 between buried regions positioned at the bottom of the same base diffusion region (Wm1>Wm2). An avalanche breakdown occurs under the bottom of the base diffusion region, and the avalanche current is not passed through a high resistance part immediately under the source diffusion region in the base diffusion region, thereby providing high withstand strength against destruction.
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