公开(公告)号：US09997384B2

公开(公告)日：2018-06-12

申请号：US13309283

申请日：2011-12-01

Applicant: Shao-Yen Ku ,  Ming-Jung Chen ,  Tzu Yang Chung ,  Chi-Yun Tseng ,  Rui-Ping Chuang

Inventor： Shao-Yen Ku ,  Ming-Jung Chen ,  Tzu Yang Chung ,  Chi-Yun Tseng ,  Rui-Ping Chuang

IPC: H01L21/67

CPC classification number: H01L21/67201

Abstract: An apparatus comprises a process chamber, and a loadlock connected to the process chamber. The loadlock is configured to have a wafer holder disposed therein. The wafer holder is configured to store a plurality of wafers, and is configured to transport the plurality of wafers away from the loadlock.