Method for making a high power semiconductor laser diode
    1.
    发明申请
    Method for making a high power semiconductor laser diode 审中-公开
    制造大功率半导体激光二极管的方法

    公开(公告)号:US20050201438A1

    公开(公告)日:2005-09-15

    申请号:US11040246

    申请日:2005-01-21

    摘要: Semiconductor laser diodes, particularly high power ridge waveguide laser diodes, are often used in opto-electronics as so-called pump laser diodes for fiber amplifiers in optical communication lines. To provide the desired high power output and stability of such a laser diode and avoid degradation during use, the present invention concerns an improved design of such a device, the improvement concerns a method of suppressing the undesired first and higher order modes of the laser which consume energy and do not contribute to the optical output of the laser, thus reducing it's efficiency. This novel effect is provided by a structure comprising CIG—for Complex Index Guiding—elements on top of the laser diode, said CIG being established by fabricating CIG elements consisting of one or a plurality of layers and containing at least one layer which provides the optical absorption of undesired modes of the lasing wavelength. This CIG preferably contains an insulating layer as a first contact layer to the semiconductor. The CIG elements are manufactured by a selected sequence of processing steps, in particular several masking steps, and are specifically shaped, both in thickness and coverage of the lasers semiconductor body, to provide desired suppression characteristics. Further, the CIG elements may be combined with the contact layer usually providing the electrical input power to the laser diode.

    摘要翻译: 半导体激光二极管,特别是高功率脊波导激光二极管,通常用作光电子学中所谓的用于光通信线路中光纤放大器的泵激光二极管。 为了提供这种激光二极管的期望的高功率输出和稳定性并且避免在使用期间的劣化,本发明涉及这种器件的改进设计,改进涉及一种抑制激光器的不期望的第一和更高阶模式的方法, 消耗能量,不对激光的光输出有贡献,从而降低了其效率。 该新颖效果由在激光二极管顶部包括CIG-复合索引引导元件的结构提供,所述CIG通过制造由一个或多个层组成的CIG元件并且包含至少一层提供光学 吸收不期望的激光波长的模式。 该CIG优选地包含作为半导体的第一接触层的绝缘层。 CIG元件通过所选择的处理步骤序列制造,特别是几个掩模步骤,并且在激光器半导体主体的厚度和覆盖范围内都被特别地成形,以提供期望的抑制特性。 此外,CIG元件可以与通常为激光二极管提供电输入功率的接触层组合。

    METHOD FOR MAKING A HIGH POWER SEMICONDUCTOR LASER DIODE
    2.
    发明申请
    METHOD FOR MAKING A HIGH POWER SEMICONDUCTOR LASER DIODE 有权
    制造高功率半导体激光二极管的方法

    公开(公告)号:US20080123697A1

    公开(公告)日:2008-05-29

    申请号:US11972156

    申请日:2008-01-10

    IPC分类号: H01S3/098

    摘要: Semiconductor laser diodes, particularly high power ridge waveguide laser diodes, are often used in opto-electronics as so-called pump laser diodes for fiber amplifiers in optical communication lines. To provide the desired high power output and stability of such a laser diode and avoid degradation during use, the present invention concerns an improved design of such a device, the improvement concerns a method of suppressing the undesired first and higher order modes of the laser which consume energy and do not contribute to the optical output of the laser, thus reducing it's efficiency. This novel effect is provided by a structure comprising CIG—for Complex Index Guiding—elements on top of the laser diode, said CIG being established by fabricating CIG elements consisting of one or a plurality of layers and containing at least one layer which provides the optical absorption of undesired modes of the lasing wavelength. This CIG preferably contains an insulating layer as a first contact layer to the semiconductor. The CIG elements are manufactured by a selected sequence of processing steps, in particular several masking steps, and are specifically shaped, both in thickness and coverage of the laser's semiconductor body, to provide desired suppression characteristics. Further, the CIG elements may be combined with the contact layer usually providing the electrical input power to the laser diode.

    摘要翻译: 半导体激光二极管,特别是高功率脊波导激光二极管,通常用作光电子学中所谓的用于光通信线路中光纤放大器的泵激光二极管。 为了提供这种激光二极管的期望的高功率输出和稳定性并且避免在使用期间的劣化,本发明涉及这种器件的改进设计,改进涉及一种抑制激光器的不期望的第一和更高阶模式的方法, 消耗能量,不对激光的光输出有贡献,从而降低了其效率。 该新颖效果由在激光二极管顶部包括CIG-复合索引引导元件的结构提供,所述CIG通过制造由一个或多个层组成的CIG元件并且包含至少一层提供光学 吸收不期望的激光波长的模式。 该CIG优选地包含作为半导体的第一接触层的绝缘层。 CIG元件通过所选择的处理步骤序列,特别是几个掩模步骤制造,并且在激光器半导体主体的厚度和覆盖范围内都被特别地成形,以提供所需的抑制特性。 此外,CIG元件可以与通常为激光二极管提供电输入功率的接触层组合。

    Semiconductor Laser Device and a Method for Manufacturing a Semiconductor Laser Device
    3.
    发明申请
    Semiconductor Laser Device and a Method for Manufacturing a Semiconductor Laser Device 审中-公开
    半导体激光装置及制造半导体激光装置的方法

    公开(公告)号:US20130051421A1

    公开(公告)日:2013-02-28

    申请号:US13592728

    申请日:2012-08-23

    IPC分类号: H01S5/028 H01L21/30

    摘要: A semiconductor laser device formed on a semiconductor substrate, the device comprising: a passivation layer arranged on an upper surface of the device structure for resisting moisture ingress, wherein the passivation layer comprises an inner layer deposited on the upper surface of the device by atomic layer deposition and an outer layer deposited on the inner layer, and comprising a material that is inert in the presence of water.

    摘要翻译: 一种形成在半导体衬底上的半导体激光器件,该器件包括:钝化层,布置在器件结构的上表面上,用于抵抗水分侵入,其中钝化层包括通过原子层沉积在器件的上表面上的内层 沉积物和沉积在内层上的外层,并且包含在水存在下为惰性的材料。

    High power semiconductor laser diode
    4.
    发明授权
    High power semiconductor laser diode 有权
    大功率半导体激光二极管

    公开(公告)号:US07623555B2

    公开(公告)日:2009-11-24

    申请号:US11972156

    申请日:2008-01-10

    IPC分类号: H01S3/098 H01S3/113 H01S5/00

    摘要: Semiconductor laser diodes, particularly high power ridge waveguide laser diodes, are often used in opto-electronics as so-called pump laser diodes for fiber amplifiers in optical communication lines. To provide the desired high power output and stability of such a laser diode and avoid degradation during use, the present invention concerns an improved design of such a device, the improvement concerns a method of suppressing the undesired first and higher order modes of the laser which consume energy and do not contribute to the optical output of the laser, thus reducing it's efficiency. This novel effect is provided by a structure comprising CIG—for Complex Index Guiding—elements on top of the laser diode, said CIG being established by fabricating CIG elements consisting of one or a plurality of layers and containing at least one layer which provides the optical absorption of undesired modes of the lasing wavelength. This CIG preferably contains an insulating layer as a first contact layer to the semiconductor. The CIG elements are manufactured by a selected sequence of processing steps, in particular several masking steps, and are specifically shaped, both in thickness and coverage of the laser's semiconductor body, to provide desired suppression characteristics. Further, the CIG elements may be combined with the contact layer usually providing the electrical input power to the laser diode.

    摘要翻译: 半导体激光二极管,特别是高功率脊波导激光二极管,通常用作光电子学中所谓的用于光通信线路中光纤放大器的泵激光二极管。 为了提供这种激光二极管的期望的高功率输出和稳定性并且避免在使用期间的劣化,本发明涉及这种器件的改进设计,改进涉及一种抑制激光器的不期望的第一和更高阶模式的方法, 消耗能量,不对激光的光输出有贡献,从而降低了其效率。 该新颖效果由在激光二极管顶部包括CIG-复合索引引导元件的结构提供,所述CIG通过制造由一个或多个层组成的CIG元件并且包含至少一层提供光学 吸收不期望的激光波长的模式。 该CIG优选地包含作为半导体的第一接触层的绝缘层。 CIG元件通过所选择的处理步骤序列,特别是几个掩模步骤制造,并且在激光器半导体主体的厚度和覆盖范围内都被特别地成形,以提供所需的抑制特性。 此外,CIG元件可以与通常为激光二极管提供电输入功率的接触层组合。

    High power semiconductor laser diode and method for making such a diode
    5.
    发明授权
    High power semiconductor laser diode and method for making such a diode 有权
    大功率半导体激光二极管及其制造方法

    公开(公告)号:US06862300B1

    公开(公告)日:2005-03-01

    申请号:US10245199

    申请日:2002-09-17

    摘要: Semiconductor laser diodes, particularly high power ridge waveguide laser diodes, are often used in opto-electronics as so-called pump laser diodes for fiber amplifiers in optical communication lines. To provide the desired high power output and stability of such a laser diode and avoid degradation during use, the present invention concerns an improved design of such a device, the improvement in particular consisting in a way of suppressing the undesired first and higher order modes of the laser which consume energy and do not contribute to the optical output of the laser, thus reducing it's efficiency. Essentially, the novel effect is provided by a structure comprising CIG—for Complex Index Guiding—elements on top of the laser diode. These CIG elements consist of one or a plurality of layers and must contain at least one layer which provides the optical absorption of undesired modes of the lasing wavelength and preferably contains an insulating layer as a first contact layer to the semiconductor. The CIG elements may be specifically shaped, both in thickness and coverage of the laser's semiconductor body, to provide desired suppression characteristics. Further, the CIG elements may be combined with the contact layer usually providing the electrical input power to the laser diode.

    摘要翻译: 半导体激光二极管,特别是高功率脊波导激光二极管,通常用作光电子学中所谓的用于光通信线路中光纤放大器的泵激光二极管。 为了提供这种激光二极管的期望的高功率输出和稳定性并且避免在使用期间的劣化,本发明涉及这种器件的改进的设计,其改进特别地包括以下方式:抑制不期望的第一和更高阶模式 激光器消耗能量并且不会对激光器的光输出有贡献,从而降低了其效率。 本质上,新颖的效果由在激光二极管顶部包括CIG-复杂索引引导元件的结构提供。 这些CIG元件由一层或多层组成,并且必须包含至少一层,其提供激发波长波长的不期望的模式的光学吸收,并且优选地包含作为半导体的第一接触层的绝缘层。 CIG元件可以在激光器的半导体主体的厚度和覆盖范围内都是特别成形的,以提供所需的抑制特性。 此外,CIG元件可以与通常为激光二极管提供电输入功率的接触层组合。