公开(公告)号：US5524574A

公开(公告)日：1996-06-11

申请号：US291833

申请日：1994-08-17

申请人： Xingming Huang ,  Kouji Izunome ,  Kazutaka Terashima ,  Yutaka Shiraishi ,  Hitoshi Sasaki ,  Shigeyuki Kimura

发明人： Xingming Huang ,  Kouji Izunome ,  Kazutaka Terashima ,  Yutaka Shiraishi ,  Hitoshi Sasaki ,  Shigeyuki Kimura

IPC分类号： C30B15/00 ,  C30B15/02 ,  C30B15/04 ,  C30B15/20

CPC分类号： C30B29/06 ,  C30B15/02 ,  C30B15/04 ,  C30B15/206 ,  Y10S117/916

摘要： The amount of Group-V element included in a melt 6 has the close relationship with the oxygen concentration of the melt 6. This relationship is utilized for controlling the oxygen concentration of a single crystal 8 at a high level. The content of Group-V element is calculated from the weight of the melt 6 gauged by a gravimeter 11 and compared with a preset value in a control unit 12. When the calculated content is smaller than the preset value, the control signal to additionally supply Group-V element to the melt 6 is outputted from the control unit 12 to a feeder 14. When the calculated content is larger than the preset value, the control signal to supply a raw material to the melt 6 is outputted to another feeder 13.

摘要翻译： 包含在熔体6中的V族元素的量与熔体6的氧浓度具有密切的关系。该关系用于高水平地控制单晶8的氧浓度。 Group-V元件的含量由重力仪11测量的熔体6的重量计算，并与控制单元12中的预设值进行比较。当计算的内容小于预设值时，控制信号附加地供应 熔体6的V族元素从控制单元12输出到进料器14.当计算出的含量大于预设值时，向熔体6供应原料的控制信号被输出到另一个进料器13。