摘要:
There is disclosed a piezoelectric/electrostrictive element which can be used as a sensor, even if a piezoelectric/electrostrictive layer cracks. Provided is a piezoelectric/electrostrictive element comprising a substrate, a lower electrode layer secured onto the substrate, and a piezoelectric/electrostrictive layer secured onto the lower electrode layer, and the coverage of the lower electrode layer with respect to the substrate is 98% or less.
摘要:
In a multilayered ceramic substrate having a ceramic substrate fireable in low temperatures and a metal member for input/output brazed to the ceramic substrate, an intermediate layer including a ceramic component is arranged between the ceramic substrate and the metal member in such a manner that thermal coefficients .alpha..sub.1, .alpha..sub.2 and .alpha..sub.3 between a room temperature and near a brazing temperature of the metal member, the ceramic component in the intermediate layer and the ceramic layer, respectively, maintains a relation of .alpha..sub.1 >.alpha..sub.2 >.alpha..sub.3. Moreover, the ceramic substrate fireable in low temperatures is constructed by first ceramic layer having a flexural strength more than 25 kg/mm.sup.2 and a second ceramic layer having a dielectric constant less than 7. In these constructions, the multilayered ceramic substrate having a sufficient adhesion strength between the metal member and the ceramic substrate and a good reliability can be obtained, while advantages of the ceramic substrate fireable in low temperatures can be maintained.
摘要翻译:在具有可在低温下燃烧的陶瓷基板的多层陶瓷基板和钎焊到陶瓷基板的输入/输出用金属构件的情况下,在陶瓷基板和金属构件之间设置包含陶瓷构件的中间层, 金属构件的室温和钎焊温度接近系数α1,α2和α3,中间层和陶瓷层中的陶瓷组分分别保持α1>α2>α3的关系。 此外,在低温下可燃的陶瓷基体由抗弯强度大于25kg / mm 2的第一陶瓷层和介电常数小于7的第二陶瓷层构成。在这些结构中,具有足够粘附性的多层陶瓷基体 可以获得金属构件和陶瓷基板之间的强度,并且可以获得良好的可靠性,同时具有陶瓷的优点 可以保持在低温下可以起火的底骨。
摘要:
There is disclosed a piezoelectric/electrostrictive element which can be used as a sensor, even if a piezoelectric/electrostrictive layer cracks. Provided is a piezoelectric/electrostrictive element 10 comprising a substrate 11, a lower electrode layer 12 secured onto the substrate 11, and a piezoelectric/electrostrictive layer 13 secured onto the lower electrode layer 12, and the coverage of the lower electrode layer 12 with respect to the substrate 11 is 98% or less.