Abstract:
A humidity detection sensor includes a lower electrode provided on a board, an upper electrode provided so as to face the lower electrode, a humidity sensing film which is formed at least between the lower electrode and the upper electrode and whose dielectric constant changes in response to humidity, and a protective film provided so as to cover the upper electrode. Each of the upper electrode and the protective film has an opening through which the humidity sensing film is partially exposed to the outside. In the opening, the humidity sensing film is provided so as to reach at least a position higher than the position of the lower surface of the protective film.
Abstract:
In a reset period of a first stage, a switching circuit is turned on, and high-level driving voltages are output from driving circuits. In a charge transfer period subsequent to the reset period, the switching circuit is turned off, and low-level driving voltages are output from the driving circuits. It is determined whether or not an output voltage of an amplifier circuit in the charge transfer period is included in a normal range. In the inspection of a second stage subsequent to the first stage, in the same manner as in the normal measurement, voltages having opposite phases are output from the driving circuits in the reset period and the charge transfer period, and it is determined whether or not the output voltage of the amplifier circuit in the charge transfer period is included in a normal range.