HUMIDITY DETECTION SENSOR AND A METHOD FOR MANUFACTURING THE SAME
    1.
    发明申请
    HUMIDITY DETECTION SENSOR AND A METHOD FOR MANUFACTURING THE SAME 有权
    湿度检测传感器及其制造方法

    公开(公告)号:US20130207673A1

    公开(公告)日:2013-08-15

    申请号:US13851795

    申请日:2013-03-27

    CPC classification number: G01N27/223 G01N1/00 G01N2201/00 H01L21/00 Y10T29/49

    Abstract: A humidity detection sensor includes a lower electrode provided on a board, an upper electrode provided so as to face the lower electrode, a humidity sensing film which is formed at least between the lower electrode and the upper electrode and whose dielectric constant changes in response to humidity, and a protective film provided so as to cover the upper electrode. Each of the upper electrode and the protective film has an opening through which the humidity sensing film is partially exposed to the outside. In the opening, the humidity sensing film is provided so as to reach at least a position higher than the position of the lower surface of the protective film.

    Abstract translation: 湿度检测传感器包括设置在板上的下电极,设置成面向下电极的上电极,至少形成在下电极和上电极之间并且其介电常数响应于 湿度和设置成覆盖上电极的保护膜。 上部电极和保护膜中的每一个具有开口,湿度感测膜通过该开口部分地暴露于外部。 在开口中,湿度感测膜被设置成至少达到比保护膜的下表面的位置更高的位置。

    INSPECTION METHOD OF SENSOR DEVICE AND SENSOR DEVICE
    2.
    发明申请
    INSPECTION METHOD OF SENSOR DEVICE AND SENSOR DEVICE 有权
    传感器装置和传感器装置的检查方法

    公开(公告)号:US20150253372A1

    公开(公告)日:2015-09-10

    申请号:US14634495

    申请日:2015-02-27

    Abstract: In a reset period of a first stage, a switching circuit is turned on, and high-level driving voltages are output from driving circuits. In a charge transfer period subsequent to the reset period, the switching circuit is turned off, and low-level driving voltages are output from the driving circuits. It is determined whether or not an output voltage of an amplifier circuit in the charge transfer period is included in a normal range. In the inspection of a second stage subsequent to the first stage, in the same manner as in the normal measurement, voltages having opposite phases are output from the driving circuits in the reset period and the charge transfer period, and it is determined whether or not the output voltage of the amplifier circuit in the charge transfer period is included in a normal range.

    Abstract translation: 在第一级的复位期间,开关电路导通,高电平驱动电压从驱动电路输出。 在复位周期之后的电荷转移期间,切换电路被断开,低电平驱动电压从驱动电路输出。 确定电荷转移期间的放大电路的输出电压是否包含在正常范围内。 在第一阶段之后的第二阶段的检查中,以与正常测量相同的方式,在复位周期和电荷转移期间,从驱动电路输出具有相反相位的电压,并且确定是否 电荷转移期间的放大电路的输出电压被包含在正常范围内。

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