公开(公告)号：US09583307B2

公开(公告)日：2017-02-28

申请号：US14788788

申请日：2015-07-01

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Emil Weisz ,  Mordechai Rozen

IPC: H01J37/16 ,  H01J37/18

CPC classification number: H01J37/18 ,  H01J37/185 ,  H01J2237/182 ,  H01J2237/28

Abstract: According to an embodiment of the invention there may be provided a system that may include a specimen chamber, an exchange chamber, a pressure monitor; and a controller. The exchange chamber may be configured to (i) receive a specimen when an exchange chamber pressure maintained within the exchange chamber is at a first pressure level, (ii) reduce the exchange chamber pressure to be lower than a specimen vapor pressure. The pressure monitor may be configured to perform, during a measurement period, at least one measurement of the exchange chamber pressure. The exchange chamber may be configured to stop a reduction of the exchange chamber pressure during the measurement period.

Abstract translation: 根据本发明的实施例，可以提供一种系统，其可以包括样本室，交换室，压力监视器; 和控制器。 交换室可以被配置为（i）当保持在交换室内的交换室压力处于第一压力水平时接收样品，（ii）将交换室压力降低到低于样品蒸汽压力。 压力监视器可以被配置为在测量周期期间执行交换室压力的至少一个测量。 交换室可以被配置为在测量期间停止减小交换室压力。

公开(公告)号：US11276545B1

公开(公告)日：2022-03-15

申请号：US17131666

申请日：2020-12-22

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Yosef Basson ,  Yuri Belenky ,  Mordechai Rozen ,  Lior Klein ,  Asaf Grosz

IPC: H01J37/09 ,  H01J37/244 ,  H01J37/28

Abstract: A method, a non-transitory computer readable medium and a system for compensating for an electromagnetic interference induced deviation of an electron beam. The method may include obtaining measurement information about a magnetic field within an electron beam tool, the measurement information is generated by at least one planar Hall Effect magnetic sensor that is located within the electron beam tool; wherein the at least one planar Hall Effect magnetic sensor comprises at least one magnetometer integrated with at least one magnetic flux concentrator; estimating the electromagnetic interference induced deviation of the electron beam, the estimating is based on the magnetic field; and setting a trajectory of the electron beam to compensate for the electromagnetic interference induced deviation of the electron beam.

公开(公告)号：US20170004951A1

公开(公告)日：2017-01-05

申请号：US14788788

申请日：2015-07-01

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Emil Weisz ,  Mordechai Rozen

IPC: H01J37/18

CPC classification number: H01J37/18 ,  H01J37/185 ,  H01J2237/182 ,  H01J2237/28

Abstract: According to an embodiment of the invention there may be provided a system that may include a specimen chamber, an exchange chamber, a pressure monitor; and a controller. The exchange chamber may be configured to (i) receive a specimen when an exchange chamber pressure maintained within the exchange chamber is at a first pressure level, (ii) reduce the exchange chamber pressure to be lower than a specimen vapor pressure. The pressure monitor may be configured to perform, during a measurement period, at least one measurement of the exchange chamber pressure. The exchange chamber may be configured to stop a reduction of the exchange chamber pressure during the measurement period.

Abstract translation: 根据本发明的实施例，可以提供一种系统，其可以包括样本室，交换室，压力监视器; 和控制器。 交换室可以被配置为（i）当保持在交换室内的交换室压力处于第一压力水平时，（ii）将交换室压力降低到低于样本蒸汽压力的情况下接收样本。 压力监视器可以被配置为在测量周期期间执行交换室压力的至少一个测量。 交换室可以被配置为在测量期间停止减小交换室压力。