公开(公告)号：US20210363637A1

公开(公告)日：2021-11-25

申请号：US17395240

申请日：2021-08-05

Applicant: ASM IP HOLDING B.V.

Inventor： Mark Hawkins ,  Matthew G. Goodman ,  Shawn Thomas

IPC: C23C16/455 ,  H01L21/687 ,  C23C16/458

Abstract: A susceptor including a generally circular body having a face with a radially inward section and a radially outward section proximate a circumference of the body, the radially outward section having at least one ring extending upward for contacting a bottom surface of a substrate, and wherein the radially inward section lacks a ring extending upward from the face.

公开(公告)号：US20150267301A1

公开(公告)日：2015-09-24

申请号：US14219839

申请日：2014-03-19

Applicant: ASM IP Holding B.V.

Inventor： Eric Hill ,  Shawn Thomas

IPC: C23C16/52

CPC classification number: C23C16/4412 ,  C23C16/45504 ,  C23C16/45508 ,  H01J37/32449 ,  H01J37/32834 ,  H01L21/67017 ,  H01L21/6719

Abstract: An improved exhaust system for a gas-phase reactor and a reactor and system including the exhaust system are disclosed. The exhaust system includes a channel fluidly coupled to an exhaust plenum. The improved exhaust system allows operation of a gas-phase reactor with desired flow characteristics while taking up relatively little space within a reaction chamber.

Abstract translation: 公开了一种用于气相反应器和包括排气系统的反应器和系统的改进的排气系统。 排气系统包括流体耦合到排气室的通道。 改进的排气系统允许具有所需流动特性的气相反应器的操作，同时在反应室内占据相对较小的空间。

公开(公告)号：US11015245B2

公开(公告)日：2021-05-25

申请号：US14219839

申请日：2014-03-19

Applicant: ASM IP Holding B.V.

Inventor： Eric Hill ,  Shawn Thomas

IPC: C23C16/52 ,  C23C16/44 ,  H01J37/32 ,  H01L21/67 ,  C23C16/455

Abstract: An improved exhaust system for a gas-phase reactor and a reactor and system including the exhaust system are disclosed. The exhaust system includes a channel fluidly coupled to an exhaust plenum. The improved exhaust system allows operation of a gas-phase reactor with desired flow characteristics while taking up relatively little space within a reaction chamber.

公开(公告)号：US11885019B2

公开(公告)日：2024-01-30

申请号：US17395240

申请日：2021-08-05

Applicant: ASM IP HOLDING B.V.

Inventor： Mark Hawkins ,  Matthew G. Goodman ,  Shawn Thomas

IPC: C23C16/455 ,  H01L21/687 ,  C23C16/458 ,  H01L21/67

CPC classification number: C23C16/45521 ,  C23C16/458 ,  C23C16/4582 ,  C23C16/4583 ,  C23C16/4585 ,  H01L21/6875 ,  H01L21/68735 ,  H01L21/67115

Abstract: A susceptor including a generally circular body having a face with a radially inward section and a radially outward section proximate a circumference of the body, the radially outward section having at least one ring extending upward for contacting a bottom surface of a substrate, and wherein the radially inward section lacks a ring extending upward from the face.