公开(公告)号：US20250043416A1

公开(公告)日：2025-02-06

申请号：US18787053

申请日：2024-07-29

Applicant: ASM IP Holding B.V.

Inventor： Iordan Iordanov ,  Osama Khalil ,  Allen D'Ambra

IPC: C23C16/40 ,  C23C16/02 ,  C23C16/455 ,  C23C16/56

Abstract: Protected metallic components and reaction chambers including protected metallic components are disclosed. Exemplary methods for forming and utilizing protected metallic components are also disclosed. Protected metallic components include a conformal protective layer disposed over a non-planar surface of a metallic core.

公开(公告)号：US20240084446A1

公开(公告)日：2024-03-14

申请号：US18465787

申请日：2023-09-12

Applicant: ASM IP Holding, B.V.

Inventor： Iordan Iordanov ,  Christiaan Werkhoven ,  Loke Yuen Wong ,  Ivo Johannes Raaijmakers ,  Osama Khalil

IPC: C23C16/40 ,  C23C16/32 ,  C23C16/34 ,  C23C16/455 ,  C23C16/458

CPC classification number: C23C16/40 ,  C23C16/325 ,  C23C16/34 ,  C23C16/45553 ,  C23C16/458

Abstract: A reaction chamber component for use in a deposition apparatus for depositing a layer of a first material on a substrate is provided. The component may have a base material being partially coated with a liner of the first material. The component may have a protective layer of a second material different than the first material on top of the liner of the first material to protect the component. This may be useful during a removal process for removing a parasitic coating of the same first material deposited during use of the reaction chamber component.

公开(公告)号：US20250115995A1

公开(公告)日：2025-04-10

申请号：US18904480

申请日：2024-10-02

Applicant: ASM IP Holding B.V.

Inventor： Iordan Iordanov ,  Jeffrey Hintz ,  Shreyas Parameshwaran ,  Dinkar Nandwana ,  Lee Donohue ,  David Groechel

IPC: C23C16/455 ,  C23C16/44 ,  C23C16/458

Abstract: A fixture includes a first end plate, a threaded member, a second end plate, and a compression member. The first end plate has a first end plate recess. The threaded member is fixed in the first end plate in extends in a direction opposite the first end plate recess. The second end plate has a second end plate recess facing the first end plate recess and is slidably received on the threaded member. The compression member is arranged on a side of the second end plate opposite the first end plate and is threadedly seated on a male threaded segment of the threaded member to reverse flow a purge fluid through a mixing block compressively fixed between the first end plate and the second end plate. Fixture arrangements, methods of making mixing blocks, mixing blocks, and semiconductor processing systems including mixing blocks are also described.

公开(公告)号：US20240326199A1

公开(公告)日：2024-10-03

申请号：US18620600

申请日：2024-03-28

Applicant: ASM IP Holding B.V.

Inventor： Iordan Iordanov ,  Osama Khalil

IPC: B24C1/08

CPC classification number: B24C1/08

Abstract: Methods and apparatuses for texturizing the interior surfaces of a workpiece are described. By harnessing abrasive material contained within the workpiece, coatings that may have accumulated over time can be removed, and the original texture of the interior surfaces may be restored. One or more external energy sources such as vibratory, acoustical, or electrical energy may be used to mobilize the abrasive material and abrade the interior surfaces. The abrasive material may take the form of either abrasive dry grit or an abrasive aqueous slurry.