公开(公告)号：USD940837S1

公开(公告)日：2022-01-11

申请号：US29702865

申请日：2019-08-22

Applicant: ASM IP Holding B.V.

Designer： DongRak Jung ,  JiHwan Ryu ,  HwiMin Nam

公开(公告)号：US20240124981A1

公开(公告)日：2024-04-18

申请号：US18377885

申请日：2023-10-09

Applicant: ASM IP Holding B.V.

Inventor： Arun Thottappayil ,  DongRak Jung ,  JongSu Kim

IPC: C23C16/455

CPC classification number: C23C16/45565

Abstract: A gas inlet tube assembly is presented. The assembly comprising a first inlet configured to insert a first process gas and a second inlet configured to insert a second process gas; a gas inlet tube configured to mix the first process gas from the first inlet and the second process gas from the second inlet, the gas inlet tube being in fluid communication with a reaction chamber of the substrate processing apparatus, comprising upper and lower segments, wherein the first inlet and the second inlet are placed in the upper segment of the gas inlet tube and face with each other directly opposite, the upper segment is converging cone shape, the lower segment is diverging cone shape, the ratio of the length of the upper segment bottom to the length of the lower segment bottom can be 0.1˜0.9, preferably 0.15˜0.25.

公开(公告)号：USD979506S1

公开(公告)日：2023-02-28

申请号：US29702888

申请日：2019-08-22

Applicant: ASM IP Holding B.V.

Designer： DongRak Jung ,  WooChan Kim ,  JiHwan Ryu

公开(公告)号：USD949319S1

公开(公告)日：2022-04-19

申请号：US29702874

申请日：2019-08-22

Applicant: ASM IP Holding B.V.

Designer： DongRak Jung ,  WooChan Kim ,  Byeongpil Park