公开(公告)号：US10310391B2

公开(公告)日：2019-06-04

申请号：US15504749

申请日：2015-07-09

Applicant: ASML Holding N.V.

Inventor： Matthew Lipson ,  Vincent Dimilia ,  Ronald Peter Totillo ,  Tammo Uitterdijk ,  Steven Michael Zimmerman

IPC: G03B27/58 ,  G03F7/20 ,  H01L21/67 ,  H01L21/683 ,  C03B23/20 ,  C03B25/02

Abstract: An electrostatic clamp (300) and a method for manufacturing the same is disclosed. The electrostatic clamp includes a first layer (302) having a first ultra-low expansion (ULE) material, a second layer (304) coupled to the first layer, having a second ULE material, and a third layer (306), coupled to the second layer, having a third ULE material. The electrostatic clamp further includes a plurality of fluid channels (316) located between the first layer and the second layer and a composite layer (308) interposed between the second layer and the third layer. The method for manufacturing the electrostatic clamp includes forming the plurality of fluid channels, disposing the composite layer on the third layer, and coupling the third layer to the second layer. The plurality of fluid channels is configured to carry a thermally conditioned fluid for temperature regulation of a clamped object.

公开(公告)号：US10274842B2

公开(公告)日：2019-04-30

申请号：US15504749

申请日：2015-07-09

Applicant: ASML Holding N.V.

Inventor： Matthew Lipson ,  Vincent Dimilia ,  Ronald Peter Totillo ,  Tammo Uitterdijk ,  Steven Michael Zimmerman

IPC: G03B27/58 ,  G03F7/20 ,  H01L21/67 ,  H01L21/683 ,  C03B23/20 ,  C03B25/02

Abstract: An electrostatic clamp (300) and a method for manufacturing the same is disclosed. The electrostatic clamp includes a first layer (302) having a first ultra-low expansion (ULE) material, a second layer (304) coupled to the first layer, having a second ULE material, and a third layer (306), coupled to the second layer, having a third ULE material. The electrostatic clamp further includes a plurality of fluid channels (316) located between the first layer and the second layer and a composite layer (308) interposed between the second layer and the third layer. The method for manufacturing the electrostatic clamp includes forming the plurality of fluid channels, disposing the composite layer on the third layer, and coupling the third layer to the second layer. The plurality of fluid channels is configured to carry a thermally conditioned fluid for temperature regulation of a clamped object.