公开(公告)号：US20230333290A1

公开(公告)日：2023-10-19

申请号：US18027415

申请日：2021-09-15

Applicant: ASML NETHERLANDS B. V.

Inventor： Ferry ZIJP ,  Ahmet Burak CUNBUL

IPC: G02B5/00 ,  G02B3/04 ,  G02B13/00 ,  G03F7/00

CPC classification number: G02B5/001 ,  G02B3/04 ,  G02B13/0095 ,  G03F7/706845 ,  G03F7/706849

Abstract: A lens system including: a first asphercal axicon lens element having a first refractive surface and a second refractive surface; a second aspherical axicon lens element having a third refractive surface similar to the second refractive surface and a fourth refractive surface similar to the first refractive surface, and an aperture stop located between the first asphercal axicon lens element and the second aspherical axicon lens element. The first aspherical axicon lens element and second aspherical axicon lens are mutually oriented such that the second refractive surface and third refractive surface are mutually facing. The first aspherical axicon lens element and the second aspherical axicon lens element are configured to minimize chromatic aberration for at least a spectral range of radiation relayed by the lens system.