公开(公告)号：US20240385531A1

公开(公告)日：2024-11-21

申请号：US18639905

申请日：2024-04-18

Applicant: ASML NETHERLANDS B.V.

Inventor： Alexandru ONOSE ,  Remco DIRKS ,  Roger Hubertus Elisabeth Clementine BOSCH ,  Sander Silvester Adelgondus Marie JACOBS ,  Frank Jaco BUIJNSTERS ,  Siebe Tjerk DE ZWART ,  Artur PALHA DA SILVA CLERIGO ,  Nick VERHEUL

IPC: G03F7/00

Abstract: A method, computer program and associated apparatuses for metrology. The method includes determining a reconstruction recipe describing at least nominal values for use in a reconstruction of a parameterization describing a target. The method includes obtaining first measurement data relating to measurements of a plurality of targets on at least one substrate, the measurement data relating to one or more acquisition settings and performing an optimization by minimizing a cost function which minimizes differences between the first measurement data and simulated measurement data based on a reconstructed parameterization for each of the plurality of targets. A constraint on the cost function is imposed based on a hierarchical prior. Also disclosed is a hybrid model method comprising obtaining a coarse model operable to provide simulated coarse data; and training a data driven model to correct the simulated coarse data so as to determine simulated data for use in reconstruction.

公开(公告)号：US20220171290A1

公开(公告)日：2022-06-02

申请号：US17436947

申请日：2020-02-26

Applicant: ASML NETHERLANDS B.V.

Inventor： Alexandru ONOSE ,  Remco DIRKS ,  Roger Hubertus Elisabeth Clementin BOSCH ,  Sander Silvester Adelgondus Marie JACOBS ,  Frank Jaco BUIJNSTERS ,  Siebe Tjerk DE ZWART ,  Artur PALHA DA SILVA CLERIGO ,  Nick VERHEUL

IPC: G03F7/20

Abstract: A method, computer program and associated apparatuses for metrology. The method includes determining a reconstruction recipe describing at least nominal values for use in a reconstruction of a parameterization describing a target. The method includes obtaining first measurement data relating to measurements of a plurality of targets on at least one substrate, the measurement data relating to one or more acquisition settings and performing an optimization by minimizing a cost function which minimizes differences between the first measurement data and simulated measurement data based on a reconstructed parameterization for each of the plurality of targets. A constraint on the cost function is imposed based on a hierarchical prior. Also disclosed is a hybrid model method comprising obtaining a coarse model operable to provide simulated coarse data; and training a data driven model to correct the simulated coarse data so as to determine simulated data for use in reconstruction.

公开(公告)号：US20210097665A1

公开(公告)日：2021-04-01

申请号：US16982092

申请日：2019-03-21

Applicant: ASML NETHERLANDS B.V.

Inventor： Chung-Bin CHUANG ,  Sander Silvester Adelgondus Marie JACOBS

IPC: G06T7/00 ,  G01B11/02

Abstract: Methods and apparatuses for determining a property of a structure fabricated on a substrate, by: determining a measured characteristic from pixels of a measured pupil image of the structure, the measured characteristic having less information than the measured pupil image; generating an initial simulated characteristic corresponding to the measured characteristic and based on a candidate model of the structure; comparing the measured characteristic to the simulated characteristic in an iterative method until a difference therebetween is less than a coarse threshold; generating an initial simulated pupil image based on the coarse model as the candidate model; comparing at least a portion of the measured pupil image to at least a portion of the simulated pupil image in an iterative method until a difference therebetween is less than a fine threshold.