公开(公告)号：US20220171290A1

公开(公告)日：2022-06-02

申请号：US17436947

申请日：2020-02-26

Applicant: ASML NETHERLANDS B.V.

Inventor： Alexandru ONOSE ,  Remco DIRKS ,  Roger Hubertus Elisabeth Clementin BOSCH ,  Sander Silvester Adelgondus Marie JACOBS ,  Frank Jaco BUIJNSTERS ,  Siebe Tjerk DE ZWART ,  Artur PALHA DA SILVA CLERIGO ,  Nick VERHEUL

IPC: G03F7/20

Abstract: A method, computer program and associated apparatuses for metrology. The method includes determining a reconstruction recipe describing at least nominal values for use in a reconstruction of a parameterization describing a target. The method includes obtaining first measurement data relating to measurements of a plurality of targets on at least one substrate, the measurement data relating to one or more acquisition settings and performing an optimization by minimizing a cost function which minimizes differences between the first measurement data and simulated measurement data based on a reconstructed parameterization for each of the plurality of targets. A constraint on the cost function is imposed based on a hierarchical prior. Also disclosed is a hybrid model method comprising obtaining a coarse model operable to provide simulated coarse data; and training a data driven model to correct the simulated coarse data so as to determine simulated data for use in reconstruction.

公开(公告)号：US20240385531A1

公开(公告)日：2024-11-21

申请号：US18639905

申请日：2024-04-18

Applicant: ASML NETHERLANDS B.V.

Inventor： Alexandru ONOSE ,  Remco DIRKS ,  Roger Hubertus Elisabeth Clementine BOSCH ,  Sander Silvester Adelgondus Marie JACOBS ,  Frank Jaco BUIJNSTERS ,  Siebe Tjerk DE ZWART ,  Artur PALHA DA SILVA CLERIGO ,  Nick VERHEUL

IPC: G03F7/00

Abstract: A method, computer program and associated apparatuses for metrology. The method includes determining a reconstruction recipe describing at least nominal values for use in a reconstruction of a parameterization describing a target. The method includes obtaining first measurement data relating to measurements of a plurality of targets on at least one substrate, the measurement data relating to one or more acquisition settings and performing an optimization by minimizing a cost function which minimizes differences between the first measurement data and simulated measurement data based on a reconstructed parameterization for each of the plurality of targets. A constraint on the cost function is imposed based on a hierarchical prior. Also disclosed is a hybrid model method comprising obtaining a coarse model operable to provide simulated coarse data; and training a data driven model to correct the simulated coarse data so as to determine simulated data for use in reconstruction.

公开(公告)号：US20230288815A1

公开(公告)日：2023-09-14

申请号：US18019968

申请日：2021-07-26

Applicant: ASML NETHERLANDS B.V.

Inventor： Siebe Tjerk DE ZWART ,  Remco DIRKS ,  Gaurav NANDA ,  Bastiaan Onne FAGGINGER AUER

IPC: G03F7/20 ,  G03F7/00

CPC classification number: G03F7/70525 ,  G03F7/70504 ,  G03F7/706839 ,  G03F7/706845

Abstract: Methods and systems for determining a mapped intensity metric are described. Determining the mapped intensity metric includes determining an intensity metric for a manufacturing system. The intensity metric is determined based on a reflectivity of a location on a substrate and a manufacturing system characteristic. Determining the mapped intensity metric also includes determining a mapped intensity metric for a reference system. The reference system has a reference system characteristic. The mapped intensity metric is determined based on the intensity metric, the manufacturing system characteristic, and the reference system characteristic, to mimic determination of the intensity metric for the manufacturing system using the reference system. In some embodiments, the reference system is virtual, and the manufacturing system is physical.