公开(公告)号：US09835957B2

公开(公告)日：2017-12-05

申请号：US15021240

申请日：2014-09-02

Applicant: ASML Netherlands B.V.

Inventor： Martijn Houben ,  Alwin De Kock ,  Hendrikus Johannes Marinus Van Abeelen ,  Marco Adrianus Peter Van Den Heuvel

IPC: B23B5/34 ,  B23B31/28 ,  G03B27/52 ,  G03B27/58 ,  G03F7/20 ,  H01L21/687

CPC classification number: G03F7/70716 ,  G03F7/707 ,  G03F7/70875 ,  H01L21/6875

Abstract: A support table to support a surface of a substrate, wherein the support table includes: a base surface substantially parallel to the surface of the substrate, a plurality of burls protruding above the base surface, each of the burls having a respective distal end and a first height above the base surface, the burls arranged such that, when the substrate is supported by the support table, the substrate is supported by the respective distal ends, and a plurality of elongate raised protrusions separated by gaps, each of the elongate raised protrusions having a second height above the base surface, wherein the elongate raised protrusions protrude above the base surface between the burls, and the second height is less than the first height; wherein the protrusions are arranged such that a plurality of the gaps are aligned to form a straight gas flow path towards an edge of the base surface.