公开(公告)号：US20130164688A1

公开(公告)日：2013-06-27

申请号：US13686186

申请日：2012-11-27

Applicant: ASML Netherlands B.V.

Inventor： Theodorus Petrus Maria CADEE ,  Koen Jacobus Johannes Maria ZAAL ,  Harmeet SINGH

IPC: G03B27/58 ,  G03F7/20 ,  H01L21/683

CPC classification number: G03B27/58 ,  G03F7/2051 ,  G03F7/707 ,  G03F7/70708 ,  H01L21/683

Abstract: A support for an object, e.g., a semiconductor substrate, includes a main body having a surface configured and arranged to have a plurality of projections. Each of the projections has an associated electrostatic actuator for displacing a free end of the associated projection relative to the main body at least in a direction in a plane parallel to a main surface of the object.

Abstract translation: 对象（例如半导体衬底）的支撑件包括主体，该主体具有被配置和布置成具有多个突起的表面。 每个突起具有相关联的静电致动器，用于至少沿平行于物体的主表面的平面中的方向相对于主体移动相关联的突起的自由端。