公开(公告)号：US09147550B2

公开(公告)日：2015-09-29

申请号：US13692461

申请日：2012-12-03

Applicant: ADVANCED ION BEAM TECHNOLOGY, INC.

Inventor： Wei-Cheng Lin ,  Zhimin Wan ,  Koulin Hu

IPC: H01J27/00 ,  H01J27/02 ,  H01J37/08

CPC classification number: H01J27/022 ,  H01J37/08 ,  H01J2237/006 ,  H01J2237/082 ,  Y10T137/0329

Abstract: A gas mixture method and apparatus of prolonging lifetime of an ion source for generating an ion beam particularly an ion beam containing carbon is proposed here. By mixing the dopant gas and the minor gas together to generate an ion beam, undesired reaction between the gas species and the ion source can be mitigated and thus lifetime of the ion source can be prolonged. Accordingly, quality of ion beam can be maintained.

Abstract translation: 这里提出了一种用于产生离子束，特别是含有离子束的离子源的寿命延长的气体混合方法和装置。 通过将掺杂气体和次要气体混合在一起以产生离子束，可以减轻气体物质和离子源之间的不期望的反应，从而可以延长离子源的寿命。 因此，可以保持离子束的质量。

公开(公告)号：US08907301B1

公开(公告)日：2014-12-09

申请号：US14017451

申请日：2013-09-04

Applicant: Advanced Ion Beam Technology, Inc.

Inventor： Koulin Hu ,  Zhimin Wan ,  Wei-Cheng Lin

IPC: H01J27/00 ,  H01J27/02

CPC classification number: H01J27/022 ,  H01J37/08 ,  H01J37/3171 ,  H01J2237/022

Abstract: A gas mixture method for generating an ion beam is provided here. By dynamically tuning the mixture ratio of the gas mixture, lifetime of the ion source of an ion implanter can be prolonged. Accordingly, quality of ion beam can be maintained and maintenance fee is reduced.

Abstract translation: 此处提供了用于产生离子束的气体混合法。 通过动态调整气体混合物的混合比，可以延长离子注入机的离子源的寿命。 因此，可以维持离子束的质量并降低维护费用。