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公开(公告)号：US20050206860A1
公开(公告)日：2005-09-22
申请号：US11067315
申请日：2005-02-25
申请人： Albrecht Hof , Guenter Maul , Lothar Gail , Wilfried Schierholz , Eberhard Jost
发明人： Albrecht Hof , Guenter Maul , Lothar Gail , Wilfried Schierholz , Eberhard Jost
CPC分类号： G03F7/70933 , G03B27/52 , G03F7/70808
摘要： A projection exposure apparatus is equipped with an illumination system, a reticle, a projection objective and an image plane. Interstitial spaces between the individual elements of the apparatus are open to the ambient space. A gas purge device which carries a stream of noble gas or nitrogen is arranged in at least one of the interstitial spaces. The gas purge device is of a shape and size so that one or more interstitial spaces are at least to a large extent sealed off from the ambient space surrounding the projection apparatus.
摘要翻译： 投影曝光装置配备有照明系统，掩模版，投影物镜和像平面。 设备的各个元件之间的间隙空间对于环境空间是开放的。 携带稀有气体或氮气流的气体净化装置布置在至少一个间隙空间中。 气体净化装置的形状和尺寸使得一个或多个间隙空间至少在很大程度上与围绕投影装置的环境空间密封。
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公开(公告)号：US07130017B2
公开(公告)日：2006-10-31
申请号：US11067315
申请日：2005-02-25
申请人： Albrecht Hof , Guenter Maul , Lothar Gail , Wilfried Schierholz , Eberhard Jost
发明人： Albrecht Hof , Guenter Maul , Lothar Gail , Wilfried Schierholz , Eberhard Jost
CPC分类号： G03F7/70933 , G03B27/52 , G03F7/70808
摘要： A projection exposure apparatus is equipped with an illumination system, a reticle, a projection objective and an image plane. Interstitial spaces between the individual elements of the apparatus are open to the ambient space. A gas purge device which carries a stream of noble gas or nitrogen is arranged in at least one of the interstitial spaces. The gas purge device is of a shape and size so that one or more interstitial spaces are at least to a large extent sealed off from the ambient space surrounding the projection apparatus.
摘要翻译： 投影曝光装置配备有照明系统，掩模版，投影物镜和像平面。 设备的各个元件之间的间隙空间对于环境空间是开放的。 携带稀有气体或氮气流的气体净化装置布置在至少一个间隙空间中。 气体净化装置的形状和尺寸使得一个或多个间隙空间至少在很大程度上与围绕投影装置的环境空间密封。
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公开(公告)号：US06619901B1
公开(公告)日：2003-09-16
申请号：US09857366
申请日：2002-01-23
IPC分类号： B65G100
CPC分类号： F24F3/161
摘要： An apparatus for air guidance in a processing chamber has a housing with an entrance gate and an exit gate. Inside the housing the processing chamber is embodied for filling and sealing small bottles or ampules. The processing chamber is separated from an outside region via an intermediate region. The intermediate region having a movable door by means of which manual interventions in the processing chamber can be made. The apparatus also has a ventilation system with a blower and a clean-air filter which inside the processing chamber generates a laminar air flow. By means of special air pressure ratios in the processing chamber the intermediate region the entrance gate and the exit gate, the occurrence of contamination, or its exceeding a tolerable amount, in the processing chamber (12) and the outside region is avoided.
摘要翻译： 在处理室中用于空气引导的装置具有带入口门和出口的壳体。 在壳体内部，处理室被实施用于填充和密封小瓶或安瓿。 处理室经由中间区域与外部区域分离。 中间区域具有可移动门，通过该可移动门可以进行处理室中的手动干预。 该装置还具有带有鼓风机和清洁空气过滤器的通风系统，其在处理室内部产生层流气流。 通过处理室中的特殊空气压力比，避免了处理室（12）和外部区域中的入口门和出口的中间区域，污染的发生或超过容许量。
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