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公开(公告)号：US10730743B2
公开(公告)日：2020-08-04
申请号：US16159477
申请日：2018-10-12
发明人： Oliver J. Kierse , Rigan McGeehan , Alfonso Berduque , Donal Peter McAuliffe , Raymond J. Speer , Brendan Cawley , Brian J. Coffey , Gerald Blaney
IPC分类号： H01L23/02 , B81B7/00 , G01N33/00 , H01L23/00 , H01L23/31 , G01N27/404 , H01L25/065 , B81C1/00 , H01L23/055 , H01L23/24 , H01L23/49 , H01L23/498 , H01L23/50
摘要： A gas sensor package is disclosed. The gas sensor package can include a housing defining a first chamber and a second chamber. An electrolyte can be provided in the first chamber. A gas inlet can provide fluid communication between the second chamber and the outside environs. The gas inlet can be configured to permit gas to enter the second chamber from the outside environs. An integrated device die can be mounted to the housing. The integrated device die can comprise a sensing element configured to detect the gas. The integrated device die can have a first side exposed to the first chamber and a second side exposed to the second chamber, with the first side opposite the second side.
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公开(公告)号：US20190195825A1
公开(公告)日：2019-06-27
申请号：US16329664
申请日：2017-08-29
发明人： Alfonso Berduque , Helen Berney , William Allan Lane , Raymond J. Speer , Brendan Cawley , Donal McAuliffe , Patrick Martin McGuinness
IPC分类号： G01N27/407 , G01N27/30
CPC分类号： G01N27/407 , G01N27/304
摘要： An electrochemical sensor is provided which may be formed using micromachining techniques commonly used in the manufacture of integrated circuits. This is achieved by forming microcapillaries in a silicon substrate and forming an opening in an insulating layer to allow environmental gases to reach through to the top side of the substrate. A porous electrode is printed on the top side of the insulating layer such that the electrode is formed in the opening in the insulating layer. The sensor also comprises at least one additional electrode. The electrolyte is then formed on top of the electrodes. A cap is formed over the electrodes and electrolyte. This arrangement may easily be produced using micromachining techniques.
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公开(公告)号：US20190135614A1
公开(公告)日：2019-05-09
申请号：US16159477
申请日：2018-10-12
发明人： Oliver J. Kierse , Rigan McGeehan , Alfonso Berduque , Donal Peter McAuliffe , Raymond J. Speer , Brendan Cawley , Brian J. Coffey , Gerald Blaney
IPC分类号： B81B7/00 , B81C1/00 , H01L23/055 , H01L23/498 , H01L23/24 , H01L23/49 , H01L23/50 , H01L23/00 , G01N33/00
摘要： A gas sensor package is disclosed. The gas sensor package can include a housing defining a first chamber and a second chamber. An electrolyte can be provided in the first chamber. A gas inlet can provide fluid communication between the second chamber and the outside environs. The gas inlet can be configured to permit gas to enter the second chamber from the outside environs. An integrated device die can be mounted to the housing. The integrated device die can comprise a sensing element configured to detect the gas. The integrated device die can have a first side exposed to the first chamber and a second side exposed to the second chamber, with the first side opposite the second side.
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公开(公告)号：US20190242847A1
公开(公告)日：2019-08-08
申请号：US15888863
申请日：2018-02-05
IPC分类号： G01N27/403
CPC分类号： G01N27/403 , G01N27/28 , G01N27/4045
摘要： A cap for use with devices, such as sensors. The cap includes protrusions on its underside, to restrict the movement of a liquid or a gel placed under cap. The protrusions may take the form of walls or pillars, depending on the application. As such, the cap retains the liquid or gel in a specified position on the device. For example, an electrochemical sensor may require a liquid electrolyte to remain in place over one or more electrodes. The protrusions may not extend far enough to touch the device, but rather leave a small gap. However, because of the surface tension of the liquid, the liquid generally stays within the protrusions.
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公开(公告)号：US20180059044A1
公开(公告)日：2018-03-01
申请号：US15251833
申请日：2016-08-30
发明人： Alfonso Berduque , Helen Berney , William Allan Lane , Raymond J. Speer , Brendan Cawley , Donal Mcauliffe , Patrick Martin McGuinness
IPC分类号： G01N27/403
CPC分类号： G01N27/403 , G01N27/4045
摘要： An electrochemical sensor is provided which may be formed using micromachining techniques commonly used in the manufacture of integrated circuits. This is achieved by forming microcapillaries in a silicon substrate and forming an opening in an insulating layer to allow environmental gases to reach through to the top side of the substrate. A porous electrode is printed on the top side of the insulating layer such that the electrode is formed in the opening in the insulating layer. The sensor also comprises at least one additional electrode. The electrolyte is then formed on top of the electrodes. A cap is formed over the electrodes and electrolyte. This arrangement may easily be produced using micromachining techniques.
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