公开(公告)号：US20250105594A1

公开(公告)日：2025-03-27

申请号：US18892108

申请日：2024-09-20

Applicant: Apple Inc.

Inventor： Pengfei Qiao ,  Fei Tan ,  Tong Chen ,  Qinghong Du ,  Siddharth Joshi ,  Nicolas Hotellier ,  Alexander Hein ,  Pierre-Antoine Delean

IPC: H01S5/183 ,  H01S5/026 ,  H01S5/042 ,  H01S5/30

Abstract: Embodiments described herein include an optoelectronic sensing device having a vertical cavity surface emitting laser (VCSEL), a resonance cavity photodetector (RCPD), and a tunnel junction. The VCSEL is at least partly defined by a first set of semiconductor layers disposed on a substrate. The first set of semiconductor layers includes a first active region. The VCSEL is configured to emit laser light towards the substrate, upon application of a first bias voltage, and undergo self-mixing interference upon reception of reflections or backscatters thereof. The RCPD is vertically adjacent to the VCSEL and is at least partly defined by a second set of semiconductor layers disposed on the substrate. The second set of semiconductor layers includes a second active region. The RCPD is configured to detect, upon application of a second bias voltage, the self-mixing interference. The tunnel junction is disposed between the first active region and the second active region.