公开(公告)号：US20230113276A1

公开(公告)日：2023-04-13

申请号：US17946716

申请日：2022-09-16

Applicant: Applied Materials, Inc.

Inventor： Wei-Sheng LEI ,  Girish Kumar GOPALAKRISHNAN NAIR ,  Kent Qiujing ZHAO ,  Daniel STOCK ,  Tobias STOLLEY ,  Thomas DEPPISCH ,  Jean DELMAS ,  Kenneth S. LEDFORD ,  Subramanya P. HERLE ,  Kiran VACHHANI ,  Mahendran CHIDAMBARAM ,  Roland TRASSL ,  Neil MORRISON ,  Frank SCHNAPPENBERGER ,  Kevin Laughton CUNNINGHAM ,  Stefan BANGERT ,  James CUSHING ,  Visweswaren SIVARAMAKRISHNAN

IPC: H01M50/102

Abstract: Methods and apparatuses for processing lithium batteries with a laser source having a wide process window, high efficiency, and low cost are provided. The laser source is adapted to achieve high average power and a high frequency of picosecond pulses. The laser source can produce a line-shaped beam either in a fixed position or in scanning mode. The system can be operated in a dry room or vacuum environment. The system can include a debris removal mechanism, for example, inert gas flow, to the processing site to remove debris produced during the patterning process.

公开(公告)号：US20220363060A1

公开(公告)日：2022-11-17

申请号：US17647780

申请日：2022-01-12

Applicant: Applied Materials, Inc.

Inventor： Daihua ZHANG ,  Kang LUO ,  Kazuya DAITO ,  Kenneth S. LEDFORD ,  Elsa MASSONNEAU ,  Alexey STEPANOV ,  Ludovic GODET ,  Mahendran CHIDAMBARAM ,  Visweswaren SIVARAMAKRISHNAN ,  Bahubali S. UPADHYE ,  Hemantha RAJU

IPC: B41J2/165

Abstract: Embodiments described herein relate to an inkjet service station and methods of servicing an inkjet printer with the inkjet service station. The inkjet service station is disposed in an inkjet printer of an inkjet chamber. The inkjet service station is operable to perform servicing operations on a processing apparatus of the inkjet printer. The servicing operations include at least one of printhead spitting, printhead purging, printhead flushing, printhead cleaning, printhead drying, or vacuum suction.