公开(公告)号：US20240347688A1

公开(公告)日：2024-10-17

申请号：US18751967

申请日：2024-06-24

Applicant: Applied Materials, Inc.

Inventor： Subramanya P. HERLE ,  Girish Kumar GOPALAKRISHNAN NAIR ,  Daniel STOCK ,  Sambhu Nath KUNDU ,  Ezhiylmurugan RANGASAMY

IPC: H01M4/04 ,  B05D3/04 ,  B05D3/14 ,  B05D5/12 ,  H01M4/1395 ,  H01M4/38

CPC classification number: H01M4/0492 ,  H01M4/0404 ,  H01M4/1395 ,  H01M4/382 ,  B05D3/044 ,  B05D3/142 ,  B05D5/12

Abstract: A method and apparatus for fabricating electrodes used in energy storage devices are provided. In some implementations a surface of the electrode is activated for (a) a pre-treatment process to remove loosely held particles from the electrode surface; (b) a pre-treatment process to activate the surface of the electrode material for improved bonding or wetting for subsequently deposited materials; (c) a post-treatment of the pre-lithiation layer to improve subsequent bonding with additionally deposited layer, for example, passivation layers; and/or (d) a post-treatment of the pre-lithiation layer to improve/accelerate absorption of the lithium into the underlying electrode material.

公开(公告)号：US20250109486A1

公开(公告)日：2025-04-03

申请号：US18832126

申请日：2022-02-11

Applicant: Sebastian FRANKE ,  Daniel STOCK ,  Tobias STOLLEY ,  Applied Materials, Inc.

Inventor： Sebastian FRANKE ,  Daniel STOCK ,  Tobias STOLLEY

IPC: C23C14/54 ,  C23C14/14 ,  C23C14/24 ,  G01B17/02

Abstract: A calibration assembly for a lithium deposition process is described. The calibration assembly includes a carrier, and a piezoelectric resonator coupled to the carrier. The calibration assembly is configured for being processed in the lithium deposition process. The lithium deposition process includes a passivation. The piezoelectric resonator is configured for being electrically connected to a driver for determining a resonant frequency of the piezoelectric resonator. The resonant frequency is indicative of a thickness of a lithium film deposited on the piezoelectric resonator in the lithium deposition process. A change of the resonant frequency over time is indicative of the passivation of the lithium film.

公开(公告)号：US20230113276A1

公开(公告)日：2023-04-13

申请号：US17946716

申请日：2022-09-16

Applicant: Applied Materials, Inc.

Inventor： Wei-Sheng LEI ,  Girish Kumar GOPALAKRISHNAN NAIR ,  Kent Qiujing ZHAO ,  Daniel STOCK ,  Tobias STOLLEY ,  Thomas DEPPISCH ,  Jean DELMAS ,  Kenneth S. LEDFORD ,  Subramanya P. HERLE ,  Kiran VACHHANI ,  Mahendran CHIDAMBARAM ,  Roland TRASSL ,  Neil MORRISON ,  Frank SCHNAPPENBERGER ,  Kevin Laughton CUNNINGHAM ,  Stefan BANGERT ,  James CUSHING ,  Visweswaren SIVARAMAKRISHNAN

IPC: H01M50/102

Abstract: Methods and apparatuses for processing lithium batteries with a laser source having a wide process window, high efficiency, and low cost are provided. The laser source is adapted to achieve high average power and a high frequency of picosecond pulses. The laser source can produce a line-shaped beam either in a fixed position or in scanning mode. The system can be operated in a dry room or vacuum environment. The system can include a debris removal mechanism, for example, inert gas flow, to the processing site to remove debris produced during the patterning process.