公开(公告)号：US20220356026A1

公开(公告)日：2022-11-10

申请号：US17721107

申请日：2022-04-14

申请人： Applied Materials, Inc.

发明人： Jean DELMAS ,  Kiran VACHHANI ,  Andreas G. HEGEDUS ,  Subramanya P. HERLE

IPC分类号： B65H23/188 ,  B65H23/038

摘要： The present disclosure generally relates to systems and methods for transporting a web through a web processing apparatus. In one aspect, a web tension adjustment unit for guiding a web. The web tension adjustment unit includes a first guide roller. The first guide roller includes an adjustment unit. The web tension adjustment unit further includes one or more first non-contact sensors positioned to measure displacement data of the web at a first location. The web tension adjustment unit further includes a system controller for controlling the adjustment unit based on the measured displacement data.

公开(公告)号：US20230113276A1

公开(公告)日：2023-04-13

申请号：US17946716

申请日：2022-09-16

申请人： Applied Materials, Inc.

发明人： Wei-Sheng LEI ,  Girish Kumar GOPALAKRISHNAN NAIR ,  Kent Qiujing ZHAO ,  Daniel STOCK ,  Tobias STOLLEY ,  Thomas DEPPISCH ,  Jean DELMAS ,  Kenneth S. LEDFORD ,  Subramanya P. HERLE ,  Kiran VACHHANI ,  Mahendran CHIDAMBARAM ,  Roland TRASSL ,  Neil MORRISON ,  Frank SCHNAPPENBERGER ,  Kevin Laughton CUNNINGHAM ,  Stefan BANGERT ,  James CUSHING ,  Visweswaren SIVARAMAKRISHNAN

IPC分类号： H01M50/102

摘要： Methods and apparatuses for processing lithium batteries with a laser source having a wide process window, high efficiency, and low cost are provided. The laser source is adapted to achieve high average power and a high frequency of picosecond pulses. The laser source can produce a line-shaped beam either in a fixed position or in scanning mode. The system can be operated in a dry room or vacuum environment. The system can include a debris removal mechanism, for example, inert gas flow, to the processing site to remove debris produced during the patterning process.

公开(公告)号：US20220158159A1

公开(公告)日：2022-05-19

申请号：US17455113

申请日：2021-11-16

申请人： Applied Materials, Inc.

发明人： David Masayuki ISHIKAWA ,  Ezhiylmurugan RANGASAMY ,  Kiran VACHHANI ,  Subramanya P. HERLE ,  Girish Kumar GOPALAKRISHNAN NAIR

IPC分类号： H01M4/04 ,  H01M4/1393 ,  H01M4/1395 ,  H01M4/62 ,  H01M4/36 ,  C23C14/58 ,  C23C14/34 ,  C23C14/56 ,  C23C16/54 ,  C23C16/56 ,  H01M4/38 ,  H01M4/587 ,  C23C14/08 ,  C23C14/06 ,  C23C14/14 ,  C23C14/12 ,  C23C14/10 ,  C23C14/30

摘要： Methods, systems, and apparatuses for coating flexible substrates are provided. A coating system includes an unwinding module housing a feed reel capable of providing a continuous sheet of flexible material, a winding module housing a take-up reel capable of storing the continuous sheet of flexible material, and a processing module arranged downstream from the unwinding module. The processing module includes a plurality of sub-chambers arranged in sequence, each configured to perform one or more processing operations to the continuous sheet of flexible material. The processing module includes a coating drum capable of guiding the continuous sheet of flexible material past the plurality of sub-chambers along a travel direction. The sub-chambers are radially disposed about the coating drum and at least one of the sub-chambers includes a deposition module. The deposition module includes a pair of electron beam sources positioned side-by-side along a transverse direction perpendicular to the travel direction.