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1.发明申请COMPACT CONFIGURABLE MODULAR RADIO FREQUENCY MATCHING NETWORK ASSEMBLY FOR PLASMA PROCESSING SYSTEMS 审中-公开用于等离子体处理系统的紧凑可配置的模块化无线电频率匹配网络组件公开(公告)号：US20160049280A1
公开(公告)日：2016-02-18
申请号：US14815945
申请日：2015-07-31
Applicant: Applied Materials, Inc.
Inventor： Jozef Kudela , Ranjit I. Shinde , Suhail Anwar
IPC: H01J37/32
CPC classification number: H01J37/32183 , H01J37/32137 , H01J2237/002 , H01J2237/332 , H01J2237/334 , H03H7/40
Abstract: A compact configurable radio frequency (RF) matching network for matching RF energy output from an RF generator to a variable impedance load is disclosed. The matching network includes an input connector; an output connector; and a component assembly array including one or more tune and load electrical components. At least one of the electrical components is coupled to the input connector, at least one of the electrical components is coupled to the output connector, the component assembly array is adapted to be arranged in a selected topology, and the selected topology is adapted to reduce RF energy reflected from the variable impedance load. Numerous other aspects are provided.
Abstract translation: 公开了一种紧凑的可配置射频（RF）匹配网络，用于将RF发射器的RF能量输出匹配到可变阻抗负载。 匹配网络包括输入连接器; 输出连接器; 以及包括一个或多个调谐和负载电气部件的部件组件阵列。 电气部件中的至少一个耦合到输入连接器，电气部件中的至少一个耦合到输出连接器，部件组件阵列适于被布置在选定的拓扑中，并且所选择的拓扑适于减少 从可变阻抗负载反射的RF能量。 提供了许多其他方面。
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2.发明授权公开(公告)号：US10043638B2
公开(公告)日：2018-08-07
申请号：US14815945
申请日：2015-07-31
Applicant: Applied Materials, Inc.
Inventor： Jozef Kudela , Ranjit I. Shinde , Suhail Anwar
CPC classification number: H01J37/32183 , H01J37/32137 , H01J2237/002 , H01J2237/332 , H01J2237/334 , H03H7/40
Abstract: A compact configurable radio frequency (RF) matching network for matching RF energy output from an RF generator to a variable impedance load is disclosed. The matching network includes an input connector; an output connector; and a component assembly array including one or more tune and load electrical components. At least one of the electrical components is coupled to the input connector, at least one of the electrical components is coupled to the output connector, the component assembly array is adapted to be arranged in a selected topology, and the selected topology is adapted to reduce RF energy reflected from the variable impedance load. Numerous other aspects are provided.
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