公开(公告)号：US20220003803A1

公开(公告)日：2022-01-06

申请号：US17329172

申请日：2021-05-25

Applicant: CREATING NANO TECHNOLOGIES, INC.

Inventor： Ji-Yung LEE ,  Andrew Ronaldi TANDIO ,  Hung-Chan CHIANG ,  Bo-Fan TSAI

IPC: G01R29/22 ,  H01L41/257 ,  G01R29/12

Abstract: A method for monitoring polarization quality of a piezoelectric film is described. In this method, a detection step is performed on a piezoelectric film by using a detection device with a non-contact method during a polarization process of the piezoelectric film, to obtain a static electricity information or a transmittance information. A determination step is performed by using the static electricity information or the transmittance information to determine a polarization degree of the piezoelectric film.

公开(公告)号：US20210320242A1

公开(公告)日：2021-10-14

申请号：US17163585

申请日：2021-02-01

Applicant: CREATING NANO TECHNOLOGIES, INC.

Inventor： Ji-Yung LEE ,  Andrew Ronaldi TANDIO ,  Bo-Fan TSAI

IPC: H01L41/257 ,  H01L41/193 ,  H01L41/317

Abstract: A method for polarizing a piezoelectric film is described. In this method, a piezoelectric film is formed by using an injection deposition method. The piezoelectric film is flat adhered to a surface of a conductive substrate. A polarization process is performed on the piezoelectric film while the piezoelectric film is flat adhered to the surface of the conductive substrate.

公开(公告)号：US20210160995A1

公开(公告)日：2021-05-27

申请号：US17087577

申请日：2020-11-02

Applicant: CREATING NANO TECHNOLOGIES, INC.

Inventor： Ji-Yung LEE ,  Andrew Ronaldi TANDIO

IPC: H05H1/24

Abstract: A polarization apparatus includes a conductive carrier, a dielectric barrier discharge (DBD) plasma source, an electric net, a DBD power supply, and a DC power supply. The conductive carrier has a carrying surface which is configured to carry a work piece. The work piece includes a piezoelectric material film, and the conductive carrier is grounded. The DBD plasma source is disposed over the carrying surface and is configured to apply plasma toward the piezoelectric material film. The electric net is disposed between the carrying surface and the DBD plasma source. The DBD power supply includes a first electrode and a second electrode, in which the first electrode is electrically connected to the DBD plasma source, and the second electrode is grounded. The DC power supply includes a third electrode and a fourth electrode. The third electrode is electrically connected to the electric net, and the fourth electrode is grounded.

公开(公告)号：US20180008989A1

公开(公告)日：2018-01-11

申请号：US15622069

申请日：2017-06-13

Applicant: CREATING NANO TECHNOLOGIES, INC.

Inventor： Ji-Yung LEE ,  Min-Sheng YU ,  Guan-Hung SHEN ,  Andrew Ronaldi TANDIO

IPC: B03C3/38 ,  A61L9/22 ,  F24F3/16 ,  H01T23/00

CPC classification number: B03C3/38 ,  A61L9/22 ,  B03C3/12 ,  B03C3/41 ,  B03C3/47 ,  B03C3/60 ,  B03C2201/06 ,  B03C2201/10 ,  F24F3/166 ,  H01T23/00

Abstract: A plasma purification module is described. The plasma purification module includes a first electrode plate, a second electrode plate, at least one long electrode and a catchment element. The first electrode plate is configured to be connected to a first electrode of a power supply. The second electrode plate is disposed over a surface of the first electrode plate, and is configured to be connected to a second electrode of the power supply, in which the second electrode plate has a channel. The long electrode is configured to form a discharge area. The long electrode is disposed on the surface of the first electrode plate and passes through the channel. The long electrode has a tip. The catchment element is disposed adjacent to the tip, and is configured to provide the discharge area with mist or water.