公开(公告)号：US10161994B2

公开(公告)日：2018-12-25

申请号：US15181909

申请日：2016-06-14

Applicant: Cascade Microtech, Inc.

Inventor： Timothy Allen McMullen ,  Brent Dale Harry ,  Eric James Wilcox ,  James J. Donlin

IPC: G01R31/28

Abstract: Systems and methods for electrically testing electromigration in an electromigration test structure are disclosed herein. The systems include a voltage control portion, a current control portion, and a current regulating structure. The systems further include an electric current detector, a first system connection, and a second system connection. The systems also include a voltage detector, and a controller. In some embodiments of the methods, a voltage control portion regulates a high-side signal electric current to maintain a voltage difference below a voltage setpoint while a current control portion maintains the high-side signal electric current below a threshold current value. In some embodiments of the methods, one of the voltage difference and a magnitude of the high-side signal electric current is selected as a primary control parameter while the other is selected as a compliant control parameter.

公开(公告)号：US20170356957A1

公开(公告)日：2017-12-14

申请号：US15181909

申请日：2016-06-14

Applicant: Cascade Microtech, Inc.

Inventor： Timothy Allen McMullen ,  Brent Dale Harry ,  Eric James Wilcox ,  James J. Donlin

IPC: G01R31/28

CPC classification number: G01R31/2858 ,  G01R31/2818

Abstract: Systems and methods for electrically testing electromigration in an electromigration test structure are disclosed herein. The systems include a voltage control portion, a current control portion, and a current regulating structure. The systems further include an electric current detector, a first system connection, and a second system connection. The systems also include a voltage detector, and a controller. In some embodiments of the methods, a voltage control portion regulates a high-side signal electric current to maintain a voltage difference below a voltage setpoint while a current control portion maintains the high-side signal electric current below a threshold current value. In some embodiments of the methods, one of the voltage difference and a magnitude of the high-side signal electric current is selected as a primary control parameter while the other is selected as a compliant control parameter.