公开(公告)号：US20150008948A1

公开(公告)日：2015-01-08

申请号：US14491606

申请日：2014-09-19

Applicant: Cascade Microtech, Inc.

Inventor： Frank-Michael Werner ,  Matthias Zieger ,  Sebastian Giessmann

IPC: G01R1/073 ,  G01R1/04

CPC classification number: G01R1/073 ,  G01R1/04 ,  G01R31/2891

Abstract: A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.

公开(公告)号：US09983232B2

公开(公告)日：2018-05-29

申请号：US14491606

申请日：2014-09-19

Applicant: Cascade Microtech, Inc.

Inventor： Frank-Michael Werner ,  Matthias Zieger ,  Sebastian Giessmann

IPC: G01R1/073 ,  G01R31/28 ,  G01R1/04

CPC classification number: G01R1/073 ,  G01R1/04 ,  G01R31/2891

Abstract: A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.