Packaging for a MEMS transducer
    2.
    发明授权

    公开(公告)号:US11252513B2

    公开(公告)日:2022-02-15

    申请号:US16823588

    申请日:2020-03-19

    Abstract: The application relates to a MEMS transducer package comprising: a package substrate the package substrate comprising a substrate channel, the substrate channel comprising first and second channel portions, wherein the first portion extends in a first direction between a first channel opening in a side surface of the substrate and a junction between the first and second channel portions, and wherein the second portion extends in a second direction between said junction and a second channel opening at, or underlying, a substrate opening provided in an upper surface of the package substrate.

    Semiconductor structures
    7.
    发明授权

    公开(公告)号:US11223907B2

    公开(公告)日:2022-01-11

    申请号:US16822771

    申请日:2020-03-18

    Abstract: The present application relates to structures for supporting mechanical, electrical and/or electromechanical components, devices and/or systems and to methods of fabricating such structures. The application describes a primary die comprising an aperture extending through the die. The aperture is suitable for receiving a secondary die. A secondary die may be provided within the aperture of the primary die.

    Packaging for a MEMS transducer
    10.
    发明授权

    公开(公告)号:US11172314B2

    公开(公告)日:2021-11-09

    申请号:US16825549

    申请日:2020-03-20

    Abstract: The application describes a package substrate for a MEMS transducer package having a recessed region formed in an upper surface of the package substrate. The recessed region extends only partially through the package substrate from an opening in the upper surface of the package substrate in a first direction towards the lower surface of the substrate. The recessed region extends only partially through the package substrate from an opening in a side surface of the package substrate in a second direction towards an opposite side surface.

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