FLOWPATH STRUCTURE
    1.
    发明申请
    FLOWPATH STRUCTURE 审中-公开

    公开(公告)号:US20180209323A1

    公开(公告)日:2018-07-26

    申请号:US15744618

    申请日:2016-10-25

    Inventor: Kouji TAKAHASHI

    Abstract: A flowpath structure includes: a supply channel in which a fluid to be supplied to an apparatus flows; a discharge channel in which the fluid discharged from the apparatus flows; and a pilot type opening-and-closing valve disposed in either one channel of the supply channel and the discharge channel. The opening-and-closing valve has a main valve arranged in the either one channel, a pilot channel connecting the supply channel and the discharge channel with each other, a back pressure chamber defined in the pilot channel, and a pilot valve that opens and closes a portion of the pilot channel closer to the discharge channel than the back pressure chamber. The main valve opens and closes the either one channel based on a change in an internal pressure of the back pressure chamber caused by an opening-and-closing operation of the pilot valve.

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