专利检索 ap:("EV Group E. Thallner GmbH") AND inv:"Jürgen Mallinger" 第 1 页

1.

发明授权
Measuring device and method for determining the course of a bonding wave 有权

公开(公告)号：US12025426B2

公开(公告)日：2024-07-02

申请号：US17421267

申请日：2019-01-18

申请人： EV Group E. Thallner GmbH

发明人： Dominik Zinner , Jürgen Mallinger , Thomas Plach , Boris Povazay , Harald Rohringer , Jürgen Markus Süss

IPC分类号： G01B11/14 , G01B11/16 , H01L21/66 , H01L21/67

CPC分类号： G01B11/14 , G01B11/16 , H01L21/67288 , H01L22/12

摘要： A measuring device for determining a course of a bonding wave in a gap between a first substrate and a second substrate, and a method for determining a course of a bonding wave in a gap between a first substrate and a second substrate.