Method for fabricating a component of an abatement apparatus

    公开(公告)号:US12189362B2

    公开(公告)日:2025-01-07

    申请号:US17055391

    申请日:2019-05-13

    Abstract: A method for fabricating a component of an abatement apparatus is disclosed. The method comprises: meshing a 3D model representation of a component defining a reaction chamber of an abatement apparatus based on specified component characteristics to define an optimised finite element representation of the component; and fabricating the optimised finite element representation. In this way, a 3D model of a component of an abatement apparatus can be generated from which its performance can be modelled. Particular characteristics of the component may be defined which affect the operation of the abatement apparatus. Those characteristics may then be used to generate the optimized finite element representation of the component which has those characteristics using meshing (it will be appreciated that meshing is the operation of representing a geometric object as a set of finite elements). The optimized finite element representation may then fabricated, reliably producing a component having the required characteristics.

    METHOD FOR FABRICATING A COMPONENT OF AN ABATEMENT APPARATUS

    公开(公告)号:US20210223755A1

    公开(公告)日:2021-07-22

    申请号:US17055391

    申请日:2019-05-13

    Abstract: A method for fabricating a component of an abatement apparatus is disclosed. The method comprises: meshing a 3D model representation of a component defining a reaction chamber of an abatement apparatus based on specified component characteristics to define an optimised finite element representation of the component; and fabricating the optimised finite element representation. In this way, a 3D model of a component of an abatement apparatus can be generated from which its performance can be modelled. Particular characteristics of the component may be defined which affect the operation of the abatement apparatus. Those characteristics may then be used to generate the optimized finite element representation of the component which has those characteristics using meshing (it will be appreciated that meshing is the operation of representing a geometric object as a set of finite elements). The optimized finite element representation may then fabricated, reliably producing a component having the required characteristics.

    REINFORCED VACUUM SYSTEM COMPONENT

    公开(公告)号:US20210054852A1

    公开(公告)日:2021-02-25

    申请号:US16968985

    申请日:2019-02-12

    Abstract: The invention provides a rotor assembly for a vacuum pump. The rotor assembly comprises a hub and one or more rotor blade arrays each comprising at least one rotor blade, each rotor blade extending from a rotor blade root contiguous with the hub to a rotor blade tip, wherein each rotor blade comprises a continuous fibre reinforced matrix material. The invention further provides methods of designing and manufacturing rotor blades, and vacuum systems comprising a component comprising a continuous fibre reinforced matrix material.

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