公开(公告)号：US20250046568A1

公开(公告)日：2025-02-06

申请号：US18789391

申请日：2024-07-30

Applicant: FEI Company

Inventor： Libor Strakoš ,  Michal Geryk ,  Trevan Landin ,  Zdenêk Král ,  YoonHae Kim ,  Pengfu Hsu

IPC: H01J37/20 ,  H01J37/28

Abstract: Embodiments of an analytical instrument system, components, and methods for preparing dose-sensitive samples for microanalysis are described. A method includes receiving location data for a material sample, locating a region of interest (ROI) of the material sample in reference to the location data, cooling the material sample to a cryogenic temperature, depositing a layer over at least a portion of the ROI at the cryogenic temperature, and removing a portion of the material sample at the cryogenic temperature.

公开(公告)号：US20150330877A1

公开(公告)日：2015-11-19

申请号：US14758150

申请日：2013-12-30

Applicant: FEI COMPANY

Inventor： Michael Schmidt ,  Jeffrey Blackwood ,  Stacey Stone ,  Sang Hoon Lee ,  Ronald Kelley ,  Trevan Landin

IPC: G01N1/32 ,  H01L21/3065

CPC classification number: G01N1/32 ,  G01N1/28 ,  H01L21/30655

Abstract: A method and apparatus is provided for preparing samples for observation in a charged particle beam system in a manner that reduces or prevents artifacts. An ion beam mills exposes a cross section of the work piece using a bulk mill process. A deposition precursor gas is directed to the sample surface while a small amount of material is removed from the exposed cross section face, the deposition precursor producing a more uniform cross section. Embodiments are useful for preparing cross sections for SEM observation of samples having layers of materials of different hardnesses. Embodiments are useful for preparation of thin TEM samples.

Abstract translation: 提供了一种方法和装置，用于以减少或防止伪影的方式制备用于在带电粒子束系统中观察的样品。 离子束研磨机使用大量研磨工艺暴露工件的横截面。 沉积前体气体被引导到样品表面，同时少量的材料从暴露的横截面去除，沉积前体产生更均匀的横截面。 实施例对于制备具有不同硬度的材料层的样品的SEM观察的截面是有用的。 实施例可用于制备薄TEM样品。