公开(公告)号：US09151597B2

公开(公告)日：2015-10-06

申请号：US13763827

申请日：2013-02-11

Applicant: FIRST SOLAR, INC.

Inventor： Benjamin Milliron ,  Dale Roberts ,  David Berger ,  William Logan

IPC: G01B11/14 ,  H01L21/66 ,  G01B11/02 ,  H01L21/67 ,  H01L21/677

CPC classification number: G01B11/14 ,  G01B11/028 ,  H01L21/67248 ,  H01L21/67259 ,  H01L21/6776 ,  H01L22/12

Abstract: Infrared detection is used to monitor the temperature within a vapor transport deposition processing chamber. Changes in temperature that occur when a substrate passes an infrared detector are detected and used to precisely locate a position of the substrate within the chamber. Position correction of the substrate can also be implemented.

Abstract translation: 红外检测用于监测蒸气输送沉积处理室内的温度。 检测出基板通过红外检测器时发生的温度变化，并用于精确定位腔室内基板的位置。 也可以实现基板的位置校正。

公开(公告)号：US20130206065A1

公开(公告)日：2013-08-15

申请号：US13763827

申请日：2013-02-11

Applicant: FIRST SOLAR, INC.

Inventor： Benjamin Milliron ,  Dale Roberts ,  David Berger ,  William Logan

IPC: G01B11/14

CPC classification number: G01B11/14 ,  G01B11/028 ,  H01L21/67248 ,  H01L21/67259 ,  H01L21/6776 ,  H01L22/12

Abstract: Infrared detection is used to monitor the temperature within a vapor transport deposition processing chamber. Changes in temperature that occur when a substrate passes an infrared detector are detected and used to precisely locate a position of the substrate within the chamber. Position correction of the substrate can also be implemented.

Abstract translation: 红外检测用于监测蒸气输送沉积处理室内的温度。 检测出基板通过红外检测器时发生的温度变化，并用于精确定位腔室内基板的位置。 也可以实现基板的位置校正。