公开(公告)号：US20140186975A1

公开(公告)日：2014-07-03

申请号：US14133946

申请日：2013-12-19

Applicant: FIRST SOLAR, INC

Inventor： Benyamin Buller ,  Douglas Dauson ,  David Hwang ,  Scott Mills ,  Dale Roberts ,  Rui Shao ,  Zhibo Zhao

IPC: H01L21/66 ,  H01L31/0224 ,  G01B11/06

CPC classification number: H01L22/12 ,  G01B11/0625 ,  H01L31/022425 ,  H01L31/022466 ,  H01L31/1884 ,  H02S50/00 ,  Y02E10/50

Abstract: A method and system for real-time, in-line calculations of opto-electronic properties and thickness of the layers of multi-layered transparent conductive oxide stacks of photovoltaic devices is provided. The method and system include taking measurements of each layer of the stack during deposition thereof. The measurements are then used to calculate the opto-electronic properties and thicknesses of the layers in real-time.

Abstract translation: 提供了一种用于光电装置的多层透明导电氧化物层的光电性质和层的厚度实时的在线计算的方法和系统。 该方法和系统包括在沉积期间对堆叠的每个层进行测量。 然后测量用于实时地计算层的光电特性和厚度。

公开(公告)号：US20130196466A1

公开(公告)日：2013-08-01

申请号：US13754613

申请日：2013-01-30

Applicant: FIRST SOLAR, INC

Inventor： Zhibo Zhao ,  Rui Shao ,  Benyamin Buller ,  Dale Roberts

IPC: H01L31/18

CPC classification number: H01L31/1884 ,  C23C14/02 ,  C23C14/024 ,  C23C14/086 ,  C23C14/568 ,  Y02E10/50

Abstract: A method and apparatus for manufacturing a multi-layered structure includes forming a crystalline layer of a material by depositing an amorphous layer of the material on a heated substrate.

Abstract translation: 用于制造多层结构的方法和装置包括通过在加热的衬底上沉积材料的非晶层来形成材料的结晶层。

公开(公告)号：US20140185061A1

公开(公告)日：2014-07-03

申请号：US14133916

申请日：2013-12-19

Applicant: FIRST SOLAR, INC

Inventor： Benyamin Buller ,  David Hwang ,  Benjamin Milliron ,  Dale Roberts ,  Rui Shao ,  Zhibo Zhao

IPC: G01B11/06

CPC classification number: G01B11/0616 ,  G01B11/0625 ,  H02S50/10

Abstract: A method and system for real-time, in-line measurements of thicknesses of semiconductor layers of photovoltaic devices is provided. The method and system include taking ex-situ optical data measurements after deposition of the semiconductor layers. The measurements are then used to calculate the thicknesses of the layers in real-time using optical modeling software.

Abstract translation: 提供了一种用于对光伏器件的半导体层的厚度进行实时在线测量的方法和系统。 该方法和系统包括在沉积半导体层之后进行非原位光学数据测量。 然后使用光学建模软件实时测量各层的厚度。

公开(公告)号：US09245808B2

公开(公告)日：2016-01-26

申请号：US14133946

申请日：2013-12-19

Applicant: FIRST SOLAR, INC

Inventor： Benyamin Buller ,  Douglas Dauson ,  David Hwang ,  Scott Mills ,  Dale Roberts ,  Rui Shao ,  Zhibo Zhao

IPC: H01L21/00 ,  H01L21/66 ,  G01B11/06 ,  H01L31/0224 ,  H01L31/18 ,  G01R31/40

CPC classification number: H01L22/12 ,  G01B11/0625 ,  H01L31/022425 ,  H01L31/022466 ,  H01L31/1884 ,  H02S50/00 ,  Y02E10/50

Abstract: A method and system for real-time, in-line calculations of opto-electronic properties and thickness of the layers of multi-layered transparent conductive oxide stacks of photovoltaic devices is provided. The method and system include taking measurements of each layer of the stack during deposition thereof. The measurements are then used to calculate the opto-electronic properties and thicknesses of the layers in real-time.

Abstract translation: 提供了一种用于光电装置的多层透明导电氧化物层的光电性质和层的厚度实时的在线计算的方法和系统。 该方法和系统包括在沉积期间对堆叠的每个层进行测量。 然后测量用于实时地计算层的光电特性和厚度。

公开(公告)号：US09151597B2

公开(公告)日：2015-10-06

申请号：US13763827

申请日：2013-02-11

Applicant: FIRST SOLAR, INC.

Inventor： Benjamin Milliron ,  Dale Roberts ,  David Berger ,  William Logan

IPC: G01B11/14 ,  H01L21/66 ,  G01B11/02 ,  H01L21/67 ,  H01L21/677

CPC classification number: G01B11/14 ,  G01B11/028 ,  H01L21/67248 ,  H01L21/67259 ,  H01L21/6776 ,  H01L22/12

Abstract: Infrared detection is used to monitor the temperature within a vapor transport deposition processing chamber. Changes in temperature that occur when a substrate passes an infrared detector are detected and used to precisely locate a position of the substrate within the chamber. Position correction of the substrate can also be implemented.

Abstract translation: 红外检测用于监测蒸气输送沉积处理室内的温度。 检测出基板通过红外检测器时发生的温度变化，并用于精确定位腔室内基板的位置。 也可以实现基板的位置校正。

公开(公告)号：US20130206065A1

公开(公告)日：2013-08-15

申请号：US13763827

申请日：2013-02-11

Applicant: FIRST SOLAR, INC.

Inventor： Benjamin Milliron ,  Dale Roberts ,  David Berger ,  William Logan

IPC: G01B11/14

CPC classification number: G01B11/14 ,  G01B11/028 ,  H01L21/67248 ,  H01L21/67259 ,  H01L21/6776 ,  H01L22/12

Abstract: Infrared detection is used to monitor the temperature within a vapor transport deposition processing chamber. Changes in temperature that occur when a substrate passes an infrared detector are detected and used to precisely locate a position of the substrate within the chamber. Position correction of the substrate can also be implemented.

Abstract translation: 红外检测用于监测蒸气输送沉积处理室内的温度。 检测出基板通过红外检测器时发生的温度变化，并用于精确定位腔室内基板的位置。 也可以实现基板的位置校正。