公开(公告)号：US10266402B2

公开(公告)日：2019-04-23

申请号：US13681967

申请日：2012-11-20

Applicant: FormFactor, Inc.

Inventor： Onnik Yaglioglu ,  Benjamin N. Eldridge ,  Alexander Slocum

IPC: B82Y30/00 ,  G01R1/067 ,  G01Q70/12 ,  G01R1/073

Abstract: Electrically conductive columns of intertwined carbon nanotubes embedded in a mass of material flexible, resilient electrically insulating material can be used as electrically conductive contact probes. The columns can extend between opposing sides of the mass of material. Terminals of a wiring substrate can extend into the columns and be electrically connected to an electrical interface to a tester that controls testing of a device under test. A pair of physically interlocked structures can coupling the mass of material to the wiring substrate. The pair can include a receptacle and a protrusion.

公开(公告)号：US20140139250A1

公开(公告)日：2014-05-22

申请号：US13681967

申请日：2012-11-20

Applicant: FORMFACTOR, INC.

Inventor： Onnik Yaglioglu ,  Benjamin N. Eldridge ,  Alexander Slocum

IPC: G01R1/073

CPC classification number: B82Y30/00 ,  G01R1/06744 ,  G01R1/07314

Abstract: Electrically conductive columns of intertwined carbon nanotubes embedded in a mass of material flexible, resilient electrically insulating material can be used as electrically conductive contact probes. The columns can extend between opposing sides of the mass of material. Terminals of a wiring substrate can extend into the columns and be electrically connected to an electrical interface to a tester that controls testing of a device under test. A pair of physically interlocked structures can coupling the mass of material to the wiring substrate. The pair can include a receptacle and a protrusion.

Abstract translation: 嵌入质量柔软，有弹性的电绝缘材料的缠绕在一起的碳纳米管的导电柱可用作导电接触探针。 柱可以在材料块的相对侧之间延伸。 布线基板的端子可以延伸到列中并且电连接到电连接到测试器的电接口，该测试器控制被测器件的测试。 一对物理互锁的结构可以将材料质量耦合到布线基板。 该对可以包括容器和突起。